Asml Holding N.v.

Asml Holdings N.v.

Peter Richard Helmus

Ronald A Wilklow

Matthew Lipson

Kennard White

James Kennon

Wilbur Jordan Reichmann, Ii

An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

An electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The clamp comprises a first layer of material, an electrode disposed over the first layer, an isolating, dielectric or semi-dielectric material deposited between portions of the electrode, and a second layer disposed over the electrode. Further, a method of manufacturing of the electrostatic clamp is described.

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New Milford, CT, United States of America

Peter Richard Helmus