Lam Research Corporation

Peter R Wassei

Richard Howard Gould

Robert J O'Donnell

Brandon L Senn

Scott Vernon Wong

Bridget Hill

Evelio Sevillano

Silvia Rocio Aguilar Amaya

Todd Anthony Lopes

Thomas Chang

Steven Edmund Pracko

Ronda Ropes

James Donald Keller

Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.

Using identifiers to map edge ring part numbers onto slot numbers

Disclosed are methods and apparatuses for recirculating gas in an equipment front end module ('EFEM'), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.

Equipment front end module gas recirculation

Growing community of inventors

Newberg, OR, United States of America

Peter R Wassei