Advanced Fuel Research, Inc.

On-line Technologies, Inc.

Image Insight, Inc.

United Technologies Corporation

Thebeamer, LLC

Peter R Solomon

Robert M Carangelo

Eric P Rubenstein

Marek A Wojtowicz

James R Markham

Gordon A Drukier

Michael A Serio

Joseph E Cosgrove

William M Pramenko

Peter A Rosenthal

Kenneth W Wang

David G Hamblen

Philip W Morrison, Jr

Philip E Best

David D Wright

Stephen C Bates

Brian Weinberg

Robert H Hobbs

Martin L Spartz

Arthur Michael McIntosh

Anthony S Bonanno

Igor Senderovich

William J Eikleberry

Philip W Morrison

Terence C Murray

Lawrence J Grigely

Mark D Dettori

Chad M Nelson

Yonatan B Rubenstein

C Peter Van Dine

Stuart Farquharson

Joshua C Kessler

Shaohua Liu

A medical imaging system for detecting ionizing radiation. The system includes one or more pixilated imagers positioned to acquire patient image data and one or more position sensors positioned to acquire patient position data. Once the patient image data and patient position data are acquired, one or more processors operably connected to each of the one or more pixilated imagers and one or more position sensors calculate a three-dimensional mass distribution based on patient image data and patient position data.

Medical devices for diagnostic imaging

Systems and methods for calibrating multiple electronic devices are described herein. Such methods may include obtaining, by a processor, data from a plurality of reference electronic devices, analyzing, by a processor, the data and calibrating, by the processor, the electronic device based on the analyzed data obtained from the plurality of reference electronic devices.

Crowd-sourced hardware calibration

An educational system presents an interactive avatar representing a subject matter expert in a particular field on a student's device, where the avatar can respond to queries posed by the student, and accompany the response with additional supporting information. The avatar's responses are based on artificial intelligence comparisons between the student queries and a knowledge base of anticipated questions, responses and learning goals. An authoring manager system employs natural language processing to identify an underlying meaning in the student's query and to add semantically equivalent questions in the knowledge base and internet searches to aid in compiling the list of anticipated questions. A student profile is stored containing student information and a history of the student's interaction with the avatar. Learning manager software, using the learning goals in the knowledge base and a record of the conversation, can compare and assess the student's progress to the learning goals.

Educational teaching system and method utilizing interactive avatars with learning manager and authoring manager functions

A fault detection and classification system for wafer etching, tool cleaning, and other fabrication processes employs exhaust gas composition data from a Fourier transform infrared spectrometer in addition to machine-state and other process-state data. Process control may be initiated based upon the classification of a fault.

Method and apparatus for fault detection and control

An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool. Cell controller software integrates an adaptive run-to-run controller, process tool recipe upload and download through a SECS port, sensor control, data archiving, and a graphical user interface.

Cell control method and apparatus

A fast and practical method for the analysis of patterned samples of semiconductor integrated circuits, and other materials, determines the thickness and composition of layers fabricated during manufacture. The method employs a measurement spot that is sufficiently large to irradiate areas of two or more different regions of the sample that result from its patterned features, generally at replicable locations. In carrying out the method, one or more of reflectance, transmittance, and radiance spectrance is measured, and the various parameters characterizing the thickness and composition in the patterned areas are obtained using, for example, a model-based analysis of the polarization and amplitude of the emanating radiation, the model parameters being iteratively adjusted to achieve a match with measured values. The method can be made fast and practical by using measurements that are taken both before and also after treatment steps are effected, and/or by using measurements from the same location on designated samples undergoing the same process, to reduce the number of unknown parameters in a reference model.

Spectrometric method for analysis of film thickness and composition on a

A moving mirror interferometer consists of a back-to-back double mirror, operatively interposed in the paths of beams from a beamsplitter/parallel reflecting mirror combiner, and a corner cube retroreflector. One beam component from the combiner is directed toward the retroreflector, and arrives therefrom at one side of the double mirror rotated 180.degree. about its central axis; the other component from the combiner arrives at the opposite side of the double mirror without axial rotation. Alignment in the interferometer is insensitive to shearing or tilting of the optical components; the components may be semi-rigidly mounted for resilient deflection, so as to isolate them against distortion of the supporting structure, and dynamic beam path-length variation may optimally be produced by moving the corner cube retroreflector, the back-to-back double mirror, or both.

System including unified beamsplitter and parallel reflecting element,

The method determines the thickness and the free carrier concentration of at least one layer of a structure. An exposed surface of the structure is irradiated using spectral radiation, and the measured reflectance spectrum is compared to a calculated spectrum. Using algorithms that include terms representative of complex refractive indices, layer thickness, dielectric constants, and free carrier concentrations, values are iteratively assigned to the thickness and free carrier concentration parameters so as to produce a best fit relationship between the compared spectra, and to thereby determine those parameters.

Film thickness and free carrier concentration analysis method and

The structure of the invention serves to support mirrors defining a reflective channel, which can dynamically be reciprocally widened and narrowed, as in a two-beam interferometer. It is effectively divided, by pivot points on an intermedial axis, into two opposite portions of equal mass, thus affording to the structure immunization against translational forces transmitted through those points. The opposite portions also have their centers of gravity remotely located, so as to generate a counteracting torque in response to moments of rotational inertia transmitted through the pivot points. In the structure, integrally formed planar pieces are assembled to provide contiguous elongate elements and an interposed connecting web element, a plurality of which web elements produce a flexure joint.

Dynamic support structure

The structure serves to support any of various elements and objects, normally for translational movement. It is effectively divided, by pivot points on an intermedial axis, into two opposite portions of equal mass, thus affording to the structure immunization against translational forces transmitted through those points. The opposite portions also have their centers of gravity remotely located, so as to generate a counteracting torque in response to moments of rotational inertia transmitted through the pivot points. Integrally formed planar pieces are assembled to provide contiguous elongate elements and an interposed connecting web element, a plurality of which web elements produce a flexure joint in the structure.

Vibration immunizing dynamic support structure

A multiplicity of one-piece flexure plates are assembled in pairs to provide a support system on which a retroreflector may be mounted for reciprocal motion. Combined with balance bodies, the flexure plates provide a support system having portions that are dynamically and statically balanced with one another, irrespective of orientation, so as to thereby immunize the unit against extraneous forces. The motion transfer assembly is especially adapted for use to support a moving retroreflector in a two-arm interferometer that may further include a beamsplitter assembly constructed from a one-piece, integrally formed body, the body having convergent, optically flat planar surfaces of specular reflectance, and means for adjustably mounting a beamsplitter therein. The spectrometer is of modular construction, and employs an integrated clocking sub-assembly as well as a light-weight voice-coil motor.

Flexture plate motion-transfer mechanism, beam-splitter assembly, and

The method and apparatus of the invention permit in situ determinations to be made of the temperature and optical constants of a substrate surface that is being treated, by measurements of radiance, reflectance and transmittance. These determinations in turn provide, at any given instant during processing, compositional and other information, thereby affording highly effective feedback control of the processing conditions. The apparatus comprises an integrated, small and relatively inexpensive instrument for process monitoring.

Method and apparatus for monitoring layer processing

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West Hartford, CT, United States of America

Peter R Solomon