Festo Ag & Co

Peter Post

Michael Weinmann

Herbert Vollmer

Kurt Stoll

Reiner Bindig

Andreas Muth

Hans Scheurenbrand

J&uuml;rgen Gerhartz

A directly actuated electric valve is proposed that has a piezoelectric drive unit ( ) for direct actuation of a valve member ( ). The piezoelectric drive unit ( ) contains, extending transverse to the displacement direction of valve member ( ), at least one piezo-flexural element ( &prime;), which acts on valve member ( ) at one end and is mounted stationary with respect to the housing at the other, such that its electrically induced flexural motion produces the linear displacement motion of valve member ( ). Such a configuration permits very short switching times with compact dimensions.

Piezoelectric valve

A microvalve, which contains a valve member ( ) dividing a valve chamber ( ) into two chamber parts ( and ). A first chamber part ( ) is delimited by a duct layer ( ), which has an input flow opening ( ) and at least one output flow opening ( and ). Fluid transfer between the input flow opening ( ) and the output flow opening ( and ) may be controlled by the valve member ( ). Furthermore pressure relieving means are provided which are effective in the open position of the valve member ( ), such means comprising at least one expansion recess ( ) provided on the valve member and with at least partial overlap opposite to the output flow opening ( and ), same permitting an expansion of the transferring fluid. It is connected through valve member ( ) with the second chamber part ( ) so that a counter pressure may build up here causing the relief of pressure.

Microvalve

A microvalve array, which possesses a plurality of microvalves ( ) produced by microfabrication. It is furthermore provided with an electronic control means ( ), which comprises at least one function preset unit ( ) for the programmed grouped functional linking of the microvalves ( ). A fluid ducts system ( ) is connected with the microvalves ( ), the fluid ducts ( &prime;; and &prime;) of such system being individually connected for customization, starting with a standardized arrangement in a fashion dependent on the functional valve linking, predetermined by the function preset unit ( ) by opening and/or closing of passages.

Microvalve battery

A micro-valve arrangement whose micro-valve has a housing containing two opposite housing layers, between which a valve chamber is delimited, wherein a valve member is located. A fluid duct extending in one housing layer opens into the valve chamber and is controlled by the valve member. By means of an electrically operated actuator it is possible for the position of the valve member to be predetermined. Furthermore a position detector is present, which on the basis of the measured capacitance of a capacitor renders it possible to find the position of the valve member. This capacitor comprises two capacitor faces which are provided opposite to each other in the direction of motion of the valve member and on one of the housing layers.

Growing community of inventors

Nellingen-Ostfildern, Germany

Peter Post