Exxon Research and Engineering Company

Bell Telephone Laboratories

Peter Michael Eisenberger

Harry William Deckman

Brian P Flannery

Wayne G Roberge

The present invention is an apparatus for producing tomographic images of an object comprising: a beam of collimated radiation transmitted through the object in a plurality of rays, an imaging electro-optic detector for detecting the attenuated transmitted radiation after it has passed through the object, the detector including an energy convertor, image format altering device, and a readout device, wherein the detector has a detective quantum efficiency greater than 0.05, a total signal dependent background less than 10 percent of the signal from the unattenuated x-ray beam, a useful dynamic range greater than 10, a non-uniformity of response between adjacent active pixels of less than 75%, and deviations of geometric linearity that is less than 10 pixels in the recorded image, means for obtaining the attenuation coefficients from the transmitted radiation, and means for computing a reconstructed image of the object from the attenuation coefficients.

Apparatus for three dimensional tomography utilizing an electro-optic

Photolithography of microcircuits with elements in the micrometer size range is performed with X-ray exposure of photoresist layers through electron beam generated shadow masks. Synchrotron radiation from a particle accelerator is used as an intense source of well collimated X-rays and Bragg reflection from a mosaic crystal is used to provide spectral purity for good contrast in the exposed photoresist pattern.

Growing community of inventors

Morristown, NJ, United States of America

Peter Michael Eisenberger