The Boc Group, Inc.

Other

Malema Engineering Corporation

Atc Associates, Inc.

Peter Martin Pozniak

Benjamin R Roberts

Frank Jansen

Duy Khanh Trang

Sau Van Vo

Rakesh Kumar Singh

Charles Andre Provost

Colin John Dickinson

Randy Forshey

Ronald W Michelson

Curtis L Lindskog

A Laird Lobban

Olivier J Blachier

An apparatus for preventing backflow and contamination, and detecting by-pass leaks in a flow control arrangement is disclosed. The apparatus includes a vent line connecting a sweep gas source and a vent. Constant process-inert gas flows from the source through the vent line into the vent. The vent line is connected with the flow control arrangement. Any leakage in the flow control arrangement is channeled to the vent line and swept into the vent along with the sweep gas. As a result, pressure in the flow control arrangement cannot build up and leakage backflow is prevented. A flow switch may be disposed on the vent line for detecting leakage. The sweep gas flow rate is controlled at a constant level that is inadequate to actuate the flow switch and keeps the flow switch ready to actuate by any superimposed leakage. The flow switch detects a leakage when it actuates.

Internal leak detection and backflow prevention in a flow control arrangement

A tank comprising a rounded bottom section with an inlet located at the lowest point of the rounded bottom section having openings to direct fluid against the curved side walls to form a circulation cell. An outlet is provided inside the tank located above and in close proximity to the inlet. The design of the tank, inlet and outlet provide a circulation pattern that can mix, maintain and resuspend fluids and slurries.

Self-mixing tank

The invention relates to systems and methods of measuring low liquid flow rates. The system provides a controller, flow system components, and one or more load cells coupled to a collection vessel. The collection vessel includes a weir that serves as a passage to allow liquid to rise within the weir until the liquid overflows the weir. After the liquid supplied passes a hydraulic stabilization period the controller captures a load cell signal and opens a timing window. At the end of the timing window the controller captures another load cell signal. A controller calculates the mass of the collected liquid over the collection period and the flow rate such as mass rate and/or the volumetric rate. The duration of the timing window depends on the measurement desired. Since the liquid wells up and overflows the weir, the system can make precise measurements of low flow rates. In another feature, feedback control mechanisms are implemented in the batch constant flow method or steady state constant flow method. In both methods, the instantaneous measured flow rate is compared with an input command derived from flow rate calibration, sending an error correction feedback signal to the controlled valves to actuate the flow rate of liquid supply and the drain and the gas pressure, until zero error or an acceptable error margin is reached or the desired flow rate is established.

Systems and methods for measurement of low liquid flow rates

A system, apparatus and method is disclosed for providing a consistent liquid mixture according to a predetermined recipe for use at a point of use. The apparatus includes a plurality of liquid component reservoirs in which a constant gas pressure is maintained. A plurality of valves are provided, with individual valves connected to an outlet port of each reservoir. An electronic controller controls the valve actuation in a repetitive sequence to discharge predetermined doses of selected liquid components for mixing to form the consistent liquid mixture. A mixing section receives the sequence of doses to mix them together to form the liquid mixture.

Precision liquid mixing apparatus and method

A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one byproduct created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the byproduct and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.

Object plating method and system

A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined connection of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.

Apparatus for producing liquid mixture having predetermined concentration of a specific component

A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined concentration of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.

Method for producing a liquid mixture having a predetermined concentration of a specified component

A system and method for dispensing an aqueous solution to one or more points of use is provided with one or more pressure vessels that are adapted to be charged with pressurized gas to drive the aqueous solution on to the point or points of use. A humidifier is also employed to humidify the pressurized gas to at least inhibit the pressurized gas from evaporating the moisture from the aqueous solution. In such manner, changes to the make up of the aqueous solution are avoided. Such changes can produce caking and/or changes in chemical properties found in pressure vessels used in dispensing slurries.

Dispensing system and method for dispensing an aqueous solution

A valve manifold box system and method in which one or more dispense units dispense chemical to a plurality points of use. A fluid circuit is provided with valve manifolds connected in series by double walled conduits known as containment pipes. The fluid circuit is either in the form of a loop of a series of valve manifolds alternating with double walled piping so that each valve manifold is fed with chemical at opposite ends. Alternately, two dispense units could be connected to the end of an in-line type of fluid circuit. The valve manifolds are contained within valve boxes and the ends of the containment pipes are connected to the valve boxes. In this manner a leak in either the valve manifolds or the containment pipes collects within the valve boxes. Leak detectors are provided in the valve boxes and upon the sensing of a leak, the potentially leaking valve manifold as well as the associated, adjacent containment pipes feeding such valve manifold are isolated by isolation valves. In this manner, the remaining valve manifolds and hence, the points of use are above to continually be fed with chemical while the problem is investigated.

Valve box manifold system and distribution method

A liquid dispensing method and apparatus in which liquid is dispensed from chambers, that can be pressure vessels, to a flow circuit. A valve network is designed such that when one chamber functions in a dispense mode of operation another chamber functions in a return mode of operation in which unused liquid is sent back to such chamber so that liquid is continually circulated. The chamber or vessel undergoing the return mode of operation is vented through a valve that is either a pressure regulation valve having a set point of pressure or a remotely activated control valve response to liquid pressure at the point of use. In such manner internal pressure within the chamber or pressure vessel undergoing the return mode of operation is regulated to in turn regulate liquid pressure at the point of use. In case of pressure vessel operation, gas pressure within each pressure vessel can also be regulated in conjunction with internal pressure during the return mode to in turn regulate liquid pressure at the point of use. As a result of such pressure regulation, constant flow rate of liquid through the flow circuit and at the point or points of use can be assured.

Liquid dispensing apparatus and method

An apparatus and method for producing a slurry from a slurry concentrate in which streams of slurry concentrate, de-ionized water and oxidizer are pumped to form three pumped streams that are brought together to form a mixture. Homogeneity is promoted within the mixture by such devices as a static mixer and an in-line mixer of special design. The resultant homogenous stream is then pumped to dispense pressure by a dispense pump to produce a dispense stream. Part of the dispense stream, preferably about fifty percent, is recycled back to a junction at which the pumped streams join to further promote homogeneity of the slurry. For such purpose a flow network is connected to an outlet pump and such flow network is branched so as to have a dispense leg from which the dispense stream issues and a recycle leg connected to the junction for recirculating the recycle stream.

Slurry mixing apparatus and method

A modular, enclosed, interchangeable hazardous material treatment plant is disclosed. The treatment plant can utilize any one of a variety of abatement technologies for treating an unauthorized discharge of hazardous material, including spray aeration, vacuum extraction, biological, carbon, ozone, ultra-violet, or other. Regardless of the type of plant, connection to the site is made between the enclosed plant and the standard underground connection port which contains connection to all underground piping. No on-site assembly or disassembly of the plant is required. If a succession of treatment plants is required, one can be disconnected and the next connected within an hour. During treatment, all that is visible above ground is the enclosure. After treatment of the site is complete, the only visible remainder of the plant is the cover of the underground connection port.

Growing community of inventors

San Jose, CA, United States of America

Peter Martin Pozniak