Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Peter Martijn Toet

Lun Kai Cheng

Hamed Sadeghian Marnani

Arno Willem Frederik Volker

Michiel Peter Oderwald

Rik Kruidhof

Evert Nieuwkoop

Albert Dekker

Geerten Frans Ijsbrand Kramer

Martinus Cornelius Johannes Maria Van Riel

Remco Alexander Nieuwland

Aukje Arianne Annette Kastelijn

Rik Jansen

Marinus Cornelius Johannes Maria Van Riel

Translations of an object in a plurality of different spatial directions are measured using a plurality of interferometers to detect interference with light that has been reflected from a diffusively reflective surface, preferably using diffuse reflection from the same planar surface to measure in each of the different spatial directions. At least the interferometers that measure translation in directions that are not perpendicular to the surface each comprises a single mode fiber and a collimator configured to transmit the outgoing light to the object successively through the single mode fiber and the collimator, and to collect reflection into the single mode fiber with the collimator both along a same beam direction. It has been found that, when reflection of a beam with a beam direction at an oblique angle to a diffusively reflective surface is used, the interference resulting from translation of the object is due substantially only to translation in the beam direction.

Device and method for interferometric measurement of a two or three dimensional translation of an object

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample

An optical sensor interrogation system can have a light source arranged for emitting light; a first optical arrangement arranged for intercepting the light and to forward the light to an optical sensor and to receive light therefrom. The wavelength reference is adapted to provide a reference wavelength. The system can further have a second optical arrangement adapted to receive reflected light from the optical sensor, a lens system for transferring the light into a beam and a scanning assembly including a scanning unit and/or a diffractive optical element. The system can still further have a detector for receiving optical response from the scanning assembly and a data processing system. A method is used to manufacture an optical sensor interrogation system.

Optical sensor interrogation system a method of manufacturing the optical sensor interrogation system

A pressure sensing assembly (), comprising: an elongate, axially extending tube (), having a flexible tube wall () that encloses an inner pressure chamber (); and at least one sensor unit (), including: two tube wall fixation devices (), connected to the tube wall () at respective axially spaced apart positions, and configured to fix respective diameters (D, d) of the tube wall at said positions; and a first strain sensing element (), connected to the tube wall () at a first position axially in between said two tube wall devices (), and configured to provide a first signal indicative of an axial elongation of the tube wall resulting from a change in axial curvature of the tube wall when a pressure differential between the inner pressure chamber () and an outside environment () of the tube is applied across the tube wall at said first position.

Pressure sensing assembly

A transversal load insensitive optical waveguide includes a primary section having a core. The waveguide may further include an outer cladding. The primary section includes a primary section surface and the outer cladding includes an exterior surface mechanically attached to the primary section surface by an interior cladding structure forming a mechanical connection. The cladding structure is such that for at least part of a distance between each two radial corresponding points on the exterior surface and the primary section surface respectively, the mechanical connection deviates from being radial, so that a radially-directed load on an exterior surface of the outer cladding is deflected by the cladding structure.

Transversal load insensitive optical waveguide, and optical sensor comprising a wave guide

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Delft, Netherlands

Peter Martijn Toet