Advanced Technology Materials, Inc.

Elpatronic Ag

Other

Peter M Robertson

Peter Gysi

Theo Huesser

Melchior Zumbach

Felix Van Der Schaar

Martin Mueller

David W Price

Jianwen Han

Richard Bhella

Werner Federer

Martin Rosatzin

Johannes Villinger

Ronni M Etterman

The present invention relates to a method and apparatus for determining concentrations of various organic additives in metal electroplating solutions, by utilizing a mathematical correction model in combination with the conventional PCGA chrono-potentiometric analysis method, to eliminate the interaction between the observed electrochemical behavior of various organic additives, and to achieve accurate concentration determination of such additives.

Interference correction of additives concentration measurements in metal electroplating solutions

The present invention relates to an electrode assembly that is capable of both solution measurement and in-line self-cleaning. Specifically, such electrode assembly comprises a central electrode and a measurement circuit for solution measurement, and an auxiliary electrode and an auxiliary current sourse for generating gas during intervals between solution measurement cycles, so as to remove any solid or liquid residues that may passivate the central electrode, thereby cleaning and rejuvenating the central electrode and preparing it for the next solution measurement cycle.

Electrode assembly and method of using the same

The present invention relates to PCGA analytical procedure, in which each PCGA plating/measuring cycle is performed with the stripping and cleaning of test electrode immediately conducted before the equilibrium step, so as to use the metal plate layer formed during a previous plating/measuring cycle as a protective layer for the test electrode. The present invention also relates to PCGA calibration measurement protocol, in which both the calibration measurements and the sample measurement are conducted after a background measurement step.

Methods for determination of additive concentration in metal plating baths

The present invention relates to a method for determining concentration of brightener and leveler contained in an aqueous acid metal electroplating solution, by firstly determining the concentration of the brightener at a first set of measurement conditions, and secondly determining the concentration of the leveler at a second set of measurement conditions, provided that the first set of measurement conditions differ from the second set of measurement conditions on the rotation speed of a rotating disc electrode used for measuring plating potential of said aqueous acid metal electroplating solution, and optionally, the electroplating duration at which the plating potential of said aqueous acid metal electroplating solution is measured, provided that the first rotation speed is lower than the second rotation speed, and that the first electroplating duration is shorter than the second electroplating duration.

Method for determining concentrations of additives in acid copper electrochemical deposition baths

An apparatus and method for the indirect determination of concentrations of additives in metal plating electrolyte solutions, particularly organic additives in Cu-metalization baths for semiconductor manufacturing. Plating potentials between the reference and test electrodes are measured and plotted for each of the solution mixtures, and data are extrapolated to determine the concentration of the additive in the sample. A multi-cycle method determines the concentration of both accelerator and suppressor organic additives in Cu plating solution in a single test suite.

Method and apparatus for determination of additives in metal plating baths

An apparatus and method for the indirect determination of concentrations of additives in metal plating electrolyte solutions, particularly organic additives in Cu-metalization baths for semiconductor manufacturing. The apparatus features a reference electrode housed in an electrically isolated chamber and continuously immersed in the base metal plating solution (without the additive to be measured). An additive concentration determination method comprises electroplating a test electrode at a constant or known current in a mixing chamber wherein the base metal plating solution is mixed with small volumes of the sample and various calibration solutions containing the additive to be measured. Plating potentials between the electrodes are measured and plotted for each of the solution mixtures, and data are extrapolated to determine the concentration of the additive in the sample. A multi-cycle method determines the concentration of both accelerator and suppressor organic additives in Cu plating solution in a single test suite.

Apparatus for determination of additives in metal plating baths

In a method of testing a function of at least one detector at an inspection station (S) for containers, particularly in an inspection unit (R) for multi-trip bottles, a test gas is fed from a source (10) to the inspection station, or as the case may be to the detector(s), at periodic intervals.

Method of testing a function of a detector at an inspection station and

To detect contamination in used PET returnable bottles, they are fed to a first testing station which takes a gas sample from each bottle. This first testing station tests for the presence of heavy contamination. Heavily contaminated bottles are identified as dirty. The bottles are then fed to a second testing station which takes gas samples from the clean bottles and tests them for contamination with a lower detection threshold. Bottles detected here as contaminated are removed, as are the bottles which fail the first test. The two-stage process allows testing with greater sensitivity while maintaining a high bottle throughput.

Apparatus for testing bottles for the presence of contamination

Inspection of PET bottles for contamination is performed with a mass spectrometer in which the gas sample is ionized by an ionized primary gas. This causes greatly reduced fragmentation, or unambiguous fragmentation, of the gas sample. As a consequence, the spectrum obtained is very meaningful on its own, and can be interpreted very rapidly, which is an essential prerequisite for the use of mass spectrometers in industrial inspection.

Use of a mass spectrometer with secondary ionization for the inspection

Process and apparatus for testing bottles for the presence of

Process for producing diacetone-L-ketogulonic acid by passing a solution of diacetone-L-sorbose through a specially constructed electrochemical cell while applying electrical current whereby to bring about oxidation of said diacetone-L-sorbose at the anode of said electrical cell, and recovering the diacetone-L-ketogulonic acid from said electrolyzed solution. The electrochemical cell utilizes an electrode which is characterized by its including at least one electrode roll formed by spiralling a deformable sandwich arrangement of electrode layers and spacing layers for preventing direct electrical contact between them, said electrode layers being made of an electrically conductive material, at least one of the spacing layers being ion-permeable and the electrodes and spacing layers having shapes and material structures which co-operate with each other to enable electrolyte flow through said electrode roll or rolls.

Electrochemical oxidation of diacetone-L-sorbose to

Electrode arrangement for electrochemical cells. A deformable sandwich structure (working electrode, insulator, secondary electrode, insulator) forms a primary electrode arrangement. A three-dimensional structure can be formed by rolling up the primary sandwich structure around and axis. The shapes and material structures of electrodes and insulators co-operate with each other to enable axial and/or radial flow of an electrolyte which is pumped through the electrode roll. With such electrode rolls a high ratio of electrode surface to cell volume can be attained. Furthermore, by mounting one or more of the electrode rolls on a hollow axle and pumping the electrolyte through orifices of the axle from its interior into the electrode rolls, the scale-up of current and voltage of a cell is considerably facilitated and advantageously achieved.

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Winkel, Switzerland

Peter M Robertson