Solvay Sa

Peter M Predikant

Johannes Eicher

Thomas Schwarze

Maurizio Paganin

Ercan Uenveren

Holger Pernice

Oliviero Diana

Philippe Morelle

Stefan Mross

Christoph Sommer

Reiner Fischer

Alain Fobelets

A hydrogen fluoride supply unit which comprises a plurality of transportable hydrogen fluoride storage containers connected to a hydrogen fluoride supply line and a chemical plant comprising the hydrogen fluoride supply unit. Such chemical plant may be for the manufacture of fluorine, wherein the hydrogen fluoride supply line is connected to an electrolysis cell for producing fluorine by HF electrolysis of a molten salt electrolyte. A process for the manufacture of a chemical comprising using such chemical plant. Also a method for supply of hydrogen fluoride to a chemical plant, which comprises: (a) filling at least one transportable hydrogen fluoride storage container with hydrogen fluoride, (b) transporting the hydrogen fluoride storage container to the hydrogen fluoride supply unit, (c) connecting the hydrogen fluoride storage container to the hydrogen fluoride supply line, and (d) supplying hydrogen fluoride from the hydrogen fluoride storage container to the hydrogen fluoride supply line.

Hydrogen fluoride supply unit

Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems ('MEMS').

Method for the purification of fluorine

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Hannover, Germany

Peter M Predikant