Average Co-Inventor Count = 3.75
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ebara Technologies Incorporated (2 from 10 patents)
2 patents:
1. 7326103 - Vertically adjustable chemical mechanical polishing head and method for use thereof
2. 7004822 - Chemical mechanical polishing and pad dressing method