Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Lmt Lichtmesstechnik Gmbh Berlin

Peter Lange

Thomas Reiners

Carsten Diem

Beatrice Wenk

Konstantin Radewald

Mario Kirsten

Dieter Sorowka

Werner Riethmueller

A method and a gonioradiometer for the direction-dependent measurement of at least one photometric or radiometric characteristic of an optical radiation source. The emission direction of the photometric or radiometric characteristic is described using a system of planes (A, B, C), the planes of which intersect at an intersection line which passes through the radiation centroid of the radiation source, and using an emission angle (&#x3b1;, &#x3b2;, &#x3b3;) which specifies the emission direction (&#x3b1;, &#x3b2;, &#x3b3;) within a considered plane. A sensor or the radiation source is fastened to a multi-axis articulated robot. The robot is configured to only swivel about precisely one of its axes during a measuring process, in which measurement values relating to different emission angles (&#x3b1;, &#x3b2;, &#x3b3;) within a considered plane of the system of planes (A, B, C) or to different planes at a considered emission angle (&#x3b1;, &#x3b2;, &#x3b3;) are detected.

Method and gonioradiometer for the direction-dependent measurement of at least one photometric or radiometric characteristic quantity of an optical radiation source

A method is disclosed of fabricating micromechanical components provided with free-standing microstructures or membranes with predetermined mechanical stress, by initially depositing a sacrificial layer on a substrate followed by depositing a polysilicon layer on the sacrificial layer by a gaseous phase deposition and, finally, at least partial removal of the sacrificial layer. During deposition of the polysilicon layer, the process pressure selected determined the type of stress in the polysilicon layer, and the value of the stress is set by the process temperature selected. The process pressure is above the pressure range used in LPCVD reactors.

Method of fabricating micromechanical components with free-standing microstructures or membranes

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Berlin, Germany

Peter Lange