Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Holding N.v. (3 from 618 patents)
3 patents:
1. 7248336 - Method and system for improving focus accuracy in a lithography system
2. 7053984 - Method and systems for improving focus accuracy in a lithography system
3. 6859260 - Method and system for improving focus accuracy in a lithography system