Average Co-Inventor Count = 13.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Netherlands B.v. (5 from 4,892 patents)
2. Carl Zeiss Smt Gmbh (5 from 1,409 patents)
5 patents:
1. 10684551 - EUV exposure apparatus with reflective elements having reduced influence of temperature variation
2. 10317802 - EUV exposure apparatus with reflective elements having reduced influence of temperature variation
3. 10031423 - EUV exposure apparatus with reflective elements having reduced influence of temperature variation
4. 9746778 - EUV exposure apparatus with reflective elements having reduced influence of temperature variation
5. 9316929 - EUV exposure apparatus with reflective elements having reduced influence of temperature variation