Leybold Vakuum Gmbh

Peter Klingner

Heinrich Engländer

Christian Beyer

Ingo Seckel

Heinz Engländer

Martin Laerbusch

A side channel pump, preferably a vacuum pump, includes a driven rotor () and a fixed stator (). The rotor () and the stator () define a pump channel circulating in a peripheral direction. Blades are fixed onto the rotor, protruding into the cross-section of the pump channel. The pump channel also includes a blade-free side channel (). The pump channel () containing the side channel () extends in a helical manner around the rotor (). The pump channel is advantageously not limited to the length of a winding but can have the length of substantially any number of uninterrupted windings. As a result, a high suction performance and a high compression ratio in the pump can be obtained.

Pump embodied as a side channel pump

A turbomolecular vacuum pump () has an inlet () and an outlet () and rotor and stator vanes (and), situated between the inlet and outlet. The rotor vanes () have front sides () and rear sides () in relation to the direction of rotation. At least a part of the rotor vanes () have a rear side () which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes () have a front side (), which is concave on the suction side and convex on the delivery side.

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Kö'ln, Germany

Peter Klingner