Ge Infrastructure Sensing, Inc.

General Electric Company

Peter Kinnell

Russell William Craddock

Kanakasabapathi Subramanian

Kuna Venkat Satya Rama Kishore

Parag Thakre

John Christopher Greenwood

A sensor is provided having a diaphragm. One side of the diaphragm is arranged to be exposed to a fluid, to measure a characteristic of the fluid. Two supports are mounted on the diaphragm and a resonator is provided on the supports. The proportion of energy transferred from the resonator to the diaphragm is variable for the sensor to be used either as a viscosity/density sensor or as a pressure sensor.

Sensor

A resonant sensor is disclosed which may be arranged to measure the pressure of a fluid. The resonant sensor comprises a diaphragm which may be exposed to a fluid; two supports provided on the diaphragm and a resonator having at least two beams with each beam being suspended between the two supports. The ends of each beam are attached to a corresponding support at more than one point. By attaching each end of the beams to a support at more than one point, the moments and reaction forces to which the support is subjected may be balanced so that distortion of the support and diaphragm due to vibration of the resonator beams is reduced. Consequently, the resonant sensor is able to provide more precise measurements.

Resonant sensor

A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.

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Leicestershire, United Kingdom

Peter Kinnell