Air Products and Chemicals, Inc.

Peter James Maroulis

Robert Gordon Ridgeway

Patrick J Clark

Steven M Kuznicki

David A Roberts

Charles G Coe

Eugene Joseph Karwacki, Jr

Andrew David Johnson

Bing Ji

Suhas Narayan Ketkar

Steven Arthur Rogers

Robert A Byerley

Victoria J Morris

John Booker

Mark Leonard O'Neill

Timothy Christopher Golden

Raymond Nicholas Vrtis

Howard P Withers, Jr

Aaron Scott Lukas

John B Dickenson

John Giles Langan

Stephen Andrew Motika

Hoshang Subawalla

Richard Vincent Pearce

Seksan Dheandhanoo

Martin Jay Plishka

Mark Ian Sistern

A process for removing carbon-containing residues from a substrate is described herein. In one aspect, there is provided a process for removing carbon-containing residue from at least a portion of a surface of a substrate comprising: providing a process gas comprising an oxygen source, a fluorine source, an and optionally additive gas wherein the molar ratio of oxygen to fluorine contained within the process gas ranges from about 1 to about 10; activating the process gas using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the carbon-containing residue from the surface.

Method for removing carbon-containing residues from a substrate

A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.

Method for removing organic electroluminescent residues from a substrate

An on-line halogen analyzer system and method of use for semiconductor processing effluent monitoring. The system includes sampling the effluent stream into an absorption cell, and passing UV-Visible light through the effluent sample in the cell. After passing through the sample the light is collected by a photo detector for real-time wavelength-selective absorption analysis. The system provides simultaneous determination of the concentrations of multiple halogen gases (e.g. F , Cl , Br , and I ) in semiconductor processing effluent streams. The invention can be used for chemical vapor deposition (CVD) chamber cleaning endpoint determination and to improve fluorine utilization efficiency in remote plasma downstream CVD chamber cleaning processes.

On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring

An apparatus for generating a low concentration calibration gas mixture containing percent, ppm, ppb or ppt amounts of a desired analyte from a high concentration gas mixture and a high purity diluent using a series of source gas containing vessels and a series of parallel gas or chemical conduits controlled by mass flow controllers in a purged enclosure with conduits to purge gas conduits of residual gases or corrosive gases.

Dynamic dilution system

A method for detection of impurities at very low levels in hydrogen, oxygen or specialty gases comprises the metered mixture with high purity helium and subsequent selective separation of hydrogen, oxygen or specialty gas with the detection of impurities remaining in the helium by ionization spectrometry.

Method of separating and detecting impurities using a fractional

A preparative-scale gas chromatographic system has conduits and valves adapted for analysis and collection of low volatility effluent. An injection site is provided for alternately supplying liquid solvent for removing condensed effluent from the system when the flow of effluent is terminated. Conduits are joined within the thermal conductivity detector of the system to prevent condensation at the joint. Conduits are provided with copper jackets which are coupled to sources of thermal energy to prevent condensation within the conduits. A trap filter provides backpressure in the collection system wherein recovery of condensed effluent in the filter is facilitated by the smooth surface of the filter.

Automated preparative gas chromatograph

The present invention relates to a process for the selective adsorption and separation of one or more constituents from a gas stream in a gas chromatograph, wherein the gas stream is contacted with a dehydrated chabazite adsorbent having a residual water content of less than 1.5 wt % and having at least 50% of any exchangeable ion capacity exchanged with a polyvalent metal cation. The process of the present invention both anticipates separation of the constituents due to either a difference in the heats of adsorption of the constituents or a size exclusion effect.

Selective chromatographic process using an ion-exchanged, dehydrated

The present invention relates to a process for the selective adsorption and separation of one or more constituents from a gas stream in a gas chromatograph, wherein the gas stream is contacted with a dehydrated chabazite adsorbent having a residual water content of less than 1.5 wt. % and having at least 50% of any exchangeable ion capacity exchanged with a polyvalent metal cation and wherein the dehydrated chabazite has been reacted with an oxidizing atmosphere either during or following dehydration. The process of the present invention both anticipates separation of the constituents due to either a difference in the heats of adsorption of the constituents or a size exclusion effect.

Selective adsorption process using an oxidized ion-exchanged dehydrated

A selective zeolitic adsorbent is prepared by activating a zeolitic composition having at least a portion, preferably at least 50%, of the exchangeable ion capacity occupied by a cation having a charge density of 2.0 or greater, preferably a divalent cation with a charge density of 2.0 or greater, such as calcium or magnesium by thoroughly dehydrating the exchanged zeolite. Additionally, separation ability of the zeolitic adsorbent can be further increased by reacting the thoroughly dehydrated zeolite in an oxidizing atmosphere.

Selective zeolitic adsorbent and a method for activation thereof

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Alburtis, PA, United States of America

Peter James Maroulis