Asml Netherlands B.v.

Asml Holding N.v.

Peter James Graffeo

Erik Roelof Loopstra

Christopher Charles Ward

Daniel Nathan Burbank

Mark Josef Schuster

Christiaan Louis Valentin

A system () for supporting an exchangeable object () can include a movable structure () and an object holder () configured to be movable relative to the movable structure. The object holder can be configured to hold the exchangeable object. The system can also include a first actuator assembly () and second actuator assembly (). The first actuator assembly can be configured to apply a force to the object holder to translate the exchangeable object generally along a plane. The second actuator assembly can be configured to apply a bending moment to the object holder. The exchangeable object can be a patterning device of a lithographic apparatus.

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Stratford, CT, United States of America

Peter James Graffeo