Colin Electronics Co., Ltd.

Honeywell International Inc.

Boehringer Mannheim Gmbh

The United States of America

Illinois Institute of Technology

Peter J Hesketh

Christopher E Holland

Joseph R Stetter

James R Woodruff

G Jordan Maclay

Martin T Gerber

Steven M Gendel

A vibratory transducer ( ) for an accelerometer ( ) having a pair of parallel beams ( ) with first and second fixed end portions, and a pair of electrodes ( ) positioned adjacent to the beams for generating an electrostatic force to transversely vibrate the beams at a resonant frequency. The vibration frequency of the beam is generally related to axial (i.e., compression or tension) forces applied to either one of the fixed ends of the beam so that the magnitude of the force applied can be measured by changes in the vibration frequency. The electrodes and the beams each have a plurality of fingers ( ) extending laterally outward so that the beam fingers and the electrode fingers are intermeshed with each other. The intermeshed fingers reduce the transducer's sensitivity to changes in applied voltage, thereby increasing the accuracy of the frequency signal. In addition, the intermeshed fingers enable the transducer to operate effectively at pressure levels substantially above vacuum to permit gas damping of the proof mass.

Electrostatic drive for accelerometer

A biosensor comprising a substrate material, at least one antibody covalently immobilized on the substrate material, and a pair of metal contact electrodes for measuring the impedance of the biosensor. A process for producing a biosensor in accordance with this invention as well as a process for utilizing the biosensor are also disclosed.

Antibody covalently bound film immunobiosensor

An improved pressure sensor element and pressure sensor array is formed by a cathode layer, a cathode tip attached to the cathode layer, and an anode layer opposing the cathode layer. The magnitude of the electron current flowing between the cathode tip and the anode layer is dependant on the field strength at the cathode tip, which is dependant on the separation between the cathode tip and the anode layer. As a deflectable anode layer is deflected towards the cathode tip, the field strength increases, causing a corresponding change in the magnitude of the flow of electrons. The cathode tip is separated from the anode layer such that electron current is produced at relatively low voltages by tunneling or field emission. The exact method of current production is selected by controlling the initial separation between the anode layer and the cathode tip. Pressure sensor elements are produced using a series of fabrication processes including forming a hole in an insulating layer deposited on the cathode layer, depositing a cathode having a cathode tip into the hole thus formed, and bonding the anode layer onto the insulating layer, thereby forming a pressure sensor element. A plurality of pressure sensor elements are fabricated into pressure sensor arrays by this method. Pressure sensor elements or pressure sensor arrays are thus produced at low cost.

Miniature pressure sensor and pressure sensor arrays

Thermopile has a plurality of reference junctions and a plurality of measurement thermocouple junctions connected electrically alternately in series on a dielectric support. Each reference junction has thereover a first medium which is nonthermally responsive and each measurement junction has thereover a second medium which is thermally responsive. The first and second mediums occupy areas which are arranged in a checkerboard pattern, the reference junctions under areas occupied by said first medium each being electrically connected directly to a measurement thermocouple under an area occupied by said second medium.

Thermopile having reduced thermal noise

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Chicago, IL, United States of America

Peter J Hesketh