Evatec Ag

Spanset Inter Ag

Peter Horn

Andre Mamie

Heinz Siegrist

Edmund Schüngel

Adrian Herde

André MamiÉ

A measuring device for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited (under vacuum). The crystal includes two spaced-apart electrodes. A frequency generator is adapted to generate an oscillator signal at a specified output frequency. A measuring amplifier is adapted to apply the oscillator signal as a drive signal to one of the electrodes of the crystal and to provide a crystal output signal in response to the drive signal. A quadrature demodulator is adapted to down convert the crystal output signal and to provide an in-phase output signal and a quadrature output signal. A computation unit is adapted to determine one or more parameters of the crystal based on the in-phase output signal and the quadrature output signal. Furthermore, there is provided a corresponding measuring method as well as to thin-film deposition systems (including a vacuum chamber) with such a device and methods for controlling such systems.

Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited as well as thin-film deposition systems with such a device and a method for controlling such systems

A device for measuring the tension in a tensioning belt comprises a retaining device for retaining a spring element, an elastically deformable spring element that is retained by the retaining device and on which a section of the tensioning belt can apply a force and elastically deform the spring element, the ends of the spring element being moved closer to one another when the tensioning force increases, and an electronic sensor unit. The sensor unit comprises a sensor system that measures the deflection of the spring element and generates a data signal, and a transmitter for transmitting the data signal to a receiving unit. The sensor system is situated at the ends of the spring element.

Device and method for measuring the tension in a tensioning belt

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Mels, Switzerland

Peter Horn