Lambda Physik Ag

Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh

Jenoptik Laser, Optik, Systeme Gmbh

Innovavent Gmbh

Peter Heist

J&uuml;rgen Kleinschmidt

Frank Voss

Andreas G&ouml;rtler

Klaus Wolfgang Vogler

Hans-Stephan Albrecht

Juergen Kleinschmidt

Matthias Kramer

Jurgen Kleinschmidt

Klaus Wolfgang Volger

Sergei V Govorkov

Adolf Giesen

Guenter Hollemann

Marcus Serwazi

Berthold Burghardt

Klaus Brunwinkel

Peter Oesterlin

Thomas J&uuml;nemann

Ulf Krause

Günter Hollemann

Henning Schmidt

Thomas Gabler

Christian Stolzenburg

Hans-Jürgen Kahlert

A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers Mperpendicular to the propagation direction.

Anamorphotic solid-sate laser

A laser for generating pulsed laser radiation. An element is arranged in the resonator to generate laser radiation having the first wavelength by frequency conversion of the primary radiation. The resonator is switchable into a first state in which it is open to the primary radiation, and a second state in which it is closed to the primary radiation, and is open to laser radiation of the first wavelength in both states. A control unit switches the resonator from the first to the second state so that the primary radiation begins to oscillate and the pulse generation by frequency conversion begins, switches the resonator from the second to the first state, whereby primary radiation is coupled out from the resonator. It is possible to set the duration between both steps and/or the coupling-out behavior of the resonator to adjust the pulse duration via the control unit.

Laser and method for generating pulsed laser radiation

An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

Gas performance control system for gas discharge lasers

An F -excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

F2-laser with line selection

A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving voltage to a discharge circuit. A master data set of an output parameter such as any of output beam energy, bandwidth, spectrum width, long axial beam profile, short axial beam profile, beam divergence, energy stability, energy efficiency, width of the discharge, temporal beam coherence, spatial beam coherence, spatial pulse width, amplified spontaneous emission and temporal pulse width versus an input parameter such as driving voltage is generated corresponding to an optimal gas mixture status, preferably after a new fill and typically at the factory, and alternatively following a new fill at the fab. Preferably several master data sets are measured and stored following new fills corresponding to various ages and other conditions of the laser system. The master data set is stored into a memory of the control system. Several more calibration data sets are also preferably generated corresponding to other gas mixture or laser operating conditions. At another time, during a check sub-routine preferably during a subsequent start-up procedure or during each subsequent start-up procedure, a current status data set of the output and input parameters is generated corresponding to the current status of the gas mixture. The current status data set is then compared with the master data set and deviations of the current status and master data sets are noted. A follow-up procedure may be performed, preferably automatically as initiated by the processor, based on the comparison.

Performance control system and method for gas discharge lasers

A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by a resonator for generating a laser beam, a discharge circuit including a plurality of electrodes for energizing the gain medium and a line-narrowing unit within the resonator for narrowing the bandwidth of the laser system. The resonator includes a deformable resonator reflector. A technique for adjusting the bandwidth of the laser system includes adjusting a surface contour of the deformable resonator reflector. A desired bandwidth may be selected manually or using a processor which automatically controls the surface contour adjustment.

Narrow band excimer or molecular fluorine laser with adjustable bandwidth

A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by a resonator for generating a laser beam, a discharge circuit including a plurality of electrodes for energizing the gain medium and a line narrowing unit within the resonator for narrowing the bandwidth of the laser system. The resonator includes a deformable resonator reflector. A technique for adjusting the bandwidth of the laser system includes adjusting a surface contour of the deformable resonator reflector. A desired bandwidth may be selected manually or using a processor which automatically controls the surface contour adjustment.

A line narrowing unit for use within an excimer or molecular fluorine laser resonator includes a dispersive prism having antireflection coatings on entrance and exit surfaces. Entrance and exit angles and an apex angle are increased to enhance the dispersive power of the prism, while the antireflective coatings limit reflective losses. Preferably, a laser beam makes a non-symmetric pass through said prism. The apex angle is preferably greater than 65&deg;, or even 75&deg;, and the angle of incidence and the exit angle of the beam are each preferably greater than 65&deg;. A beam expanding prism configured for enhanced beam expansion has an apex angle between within a range of 37.5&deg; and 42.5&deg;, and a beam incidence angle at the entrance surface of more than 65&deg;, and an antireflection coating on preferably both the entrance and exit surfaces.

Excimer laser with line narrowing

Excimer laser

An apparatus and method are provided for bandwidth narrowing of an excimer laser to &Dgr;&lgr;&ap;6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.

Laser resonator for improving narrow band emission of an excimer laser

Growing community of inventors

Jena, Germany

Peter Heist