Kernforschungszentrum Karlsruhe Gmbh

Kernforschungszentrum Kalrsruhe Gmbh

Peter Hagmann

Wolfgang Ehrfeld

Erwin W Becker

Dietrich Munchmeyer

Asim Maner

Werner Schelb

Jurgen Mohr

A process for producing a filter including a microporous membrane and a supporting structure connected thereto, including producing a mold for the membrane and the supporting structure, filling the mold with a molding material whose solubility can be changed by high energy radiation, and forming the micropores by partial irradiation of the membrane with high energy radiation and removal of the regions having increased solubility. The filter produced according to the above method is a unitary structure with the supporting structure integrally connected to the membrane.

Microporous membrane filter and method of producing same

A method of producing a plate-shaped bearing member for sliding bearings, the structure being composed of a patterned body of supporting bearing material and a lubricant, utilizing a galvanoplastic fabrication step, the method including: producing a mold provided with a pattern of recesses, the step of producing including performing an X-ray deep-etch lithography procedure; filling the recesses to form the body of bearing material; removing the mold from the body of bearing material so that spaces are left in the bearing material; and filling the thus produced spaces with the lubricant.

Method of producing a sheet or plate-shaped structure as the bearing

A spinning nozzle plate having nozzle capillaries is produced by depositing a layer 11 of a material whose characteristics can be changed by high-energy radiation (resist material) on a galvanic electrode 12. After resist layer 11 is irradiated in a predetermined pattern and after resist material is selectively removed by a treatment which utilizes the different material characteristics resulting from the irradiation, columns of resist material remain on galvanic electrode 12 to serve as negatives 21 of the nozzle capillaries. A galvanic layer 31 which encloses the negatives 21 of the nozzle capillaries is then produced on the galvanic electrode 12. Then the galvanic layer 31 is levelled and the negatives 21 are removed, as is the galvanic electrode 12. The process is particularly useful for producing spinning nozzle plates having nozzle capillaries with profiles of a special shape, essentially if the cross-sectional dimensions of the nozzle capillaries are small.

Method for producing a spinning nozzle plate

Method for producing a plurality of deformable connecting elements for electrically joining microelectronic components. The method includes irradiating with high energy radiation portions of a plate-like member composed of material having a material characteristic which is changed by such high energy radiation, each portion having dimensions corresponding to those of a connecting element; utilizing the changed material characteristic of the material of the irradiated portions to remove such material from the irradiated portions to produce a plate-like mold containing a plurality of mold structures each defining a shape corresponding to a connecting element at a given location of said member, each such mold structure having lateral dimensions and a height dimension which is a multiple of the smallest lateral dimension; filling the mold structures with metal by electroplating the metal into such mold structures to produce metallic connecting elements; fixing the connecting elements to a microelectronic component; and removing the plate-like mold.

Method for producing connecting elements for electrically joining

The present invention relates to a method for producing spinning nozzle plates having funnel-shaped preliminary channels in flow communication with nozzle capillaries. Two embodiments of the method are provided which use photolithographic and electrodeposition techniques. Common to both embodiments of the method is the use of a metal plate provided with funnel-shaped preliminary channels as a self-aligning irradiation mask for irradiating a photoresist layer provided on the metal plate. Nozzle capillaries subsequently defined either in an electrodeposited layer according to a first embodiment of the invention or in electrodeposited tubular projections according to a second embodiment of the invention, have an offset-free, continuous transition between themselves and the preliminary channels. Photolithographic and electrodeposition techniques may also be used to define the funnel-shaped preliminary channels in the metal plates.

A method for producing spinning nozzle plates having spinning nozzle channels employs a mold plate which contains mold channels corresponding to the spinning nozzle channels. The mold plate is initially connected with a galvanic electrode containing feed channels which communicate with the mold channels. Then negatives of the spinning nozzle channels are produced by filling the mold channels and the feed channels with an electrically insulating molding material and thereafter removing the mold plate, so that columns of molding material remain connected to the galvanic electrode. Finally, a galvanic layer enclosing the negatives of the spinning nozzle channels is produced, the galvanic layer is leveled, and the negatives as well as the remaining mold material are removed. The mold plate itself may be produced by depositing a layer of resist material on a further galvanic electrode, irradiating the resist layer in a predetermined pattern using high energy radiation, selectively removing portions of the irradiated resist layer to produce negatives that are connected to the further galvanic electrode, depositing a further galvanic layer, and removing the negatives. These techniques permit economical production of spinning nozzle plates, particularly plates having nozzle capillaries with specially shaped cross sections and small critical dimensions.

Method for producing spinning nozzle plates

In order to produce a plurality of plate shaped metal bodies containing a microstructure from a single molding tool constituting a master for the bodies, a negative mold is formed by filling the recesses in the microstructure of the tool with electrically insulating material and fastening to the insulating material an electrically conductive material which contacts the end faces of the microstructure of the tool.

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Leopoldshafen, Germany

Peter Hagmann