Carl Zeiss Nts Gmbh

Nmi Naturwissenschaftliches Und Medizinisches

Peter Gnauck

Volker Drexel

Dirk Preikszas

Wilfried Nisch

Michael Steigerwald

Peter Hoffrogge

David Bate

Eric Essers

Peter Dipl-Phys Hoffrogge

A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

Detector for variable pressure areas and an electron microscope comprising a corresponding detector

A cascade type pump arrangement for a particle beam device has first and second turbomolecular pumps, wherein an outlet of the second turbomolecular pump is forepumped by an intermediate pressure region situated between a main pump port and an outlet of the first turbomolecular pump. The particle beam device has a particle beam source operated in ultra high vacuum and a specimen chamber operated at pressures from high vacuum at least up to 1 hPa.

Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device

An objective lens with magnetic and electrostatic focusing for an electron microscopy system is provided whose at least partially conical outer shape allows orienting an object to be imaged at a large angle range in respect of an electron beam, said objective lens exhibiting, at the same time, good optical parameters. This is enabled by a specific geometry of the lens elements. Furthermore, an examination for the simultaneous imaging and processing of an object is proposed which comprises, besides an electron microscopy system with the above-mentioned objective lens, also an ion beam processing system and an object support.

Objective lens for an electron microscopy system and electron microscopy system

The invention concerns an &ldquo;in situ&rdquo; ion-etching device for local thinning of a sample in a transmission electron microscope (,) with simultaneous electron microscopic observation. Towards this end, an ion beam device (,) is arranged in such a way that the finest possible ion probe is produced at the sample location and can be scanned over the sample surface. The ion beam (,) and sample (,) thereby enclose the flattest possible angle. To compensate for the magnetic field of the objective lens (,), the ion beam (,) is defected along a curved path onto the sample (,). In a preferred embodiment, an electrostatic cylinder capacitor sector field effects double focusing. The ion probe can be positioned, via the scanned ion image, onto a selected region of the sample by the secondary electrons (,) released from the sample (,). The sample location can be observed during the ion thinning process in electron transmission or electron diffraction. It is thereby possible to carry out target preparations under high-resolution observing conditions and to eliminate contaminant or reactive layers.

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Reutlingen, Germany

Peter Gnauck