Capres A/s

Kla Corporation

Peter Folmer Nielsen

Hans Henrik Jochumsen

Niels Torp Madsen

Henrik Baekbo

Chaker Khalfaoui

Lauge Gammelgaard

Lars Norregaard

Anders Jensen

Jannik Sadolin

Hans Henrik Jankjaer

Christian Leth Petersen

Peter R E Petersen

Jesper Erdman Hansen

Ulrich Joachim Quaade

Ole Hansen

Dirch Hjorth Petersen

Alberto Cagliani

Henrik Hartmann Henrichsen

Frederik Westergaard Østerberg

Peter Bøggild

Francois Grey

Frederik Westergaard ØSterberg

Peter RE Petersen

Ulrich Quaade

Hans Henrik Jankjær

Lauge Gammelgård

Henrik Bækbo

Lars Nørregaard

Chaker Chalfoui

A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.

Probe for testing an electrical property of a test sample

Cover, connector, and handle assembly attachable to a rack for a rack-supported multi-point electrical probe holder

Rack for supporting a multi-point electrical probe holder

Rack, cover, connector, and handle assembly for a rack-supported multi-point electrical probe holder

A multi-point probe particularly suitable for automated handling is disclosed. An automated multi-point measuring system including the multi-point probe and a probe manipulator head is also disclosed In addition, an automated multi-point probe gripping system including a probe holder and the probe manipulator head is revealed. Further, a loaded probe loader comprising a probe loader and a probe cassette for handling the multi-point probe is also revealed, where the probe cassette is provided with the probe holder for securing the multi-point probe.

Automated multi-point probe manipulation

A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.

Method for providing alignment of a probe

Connector for a microchip probe

An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.

Electrical feedback detection system for multi-point probes

The multi-point probe comprises a supporting body defining a first surface, a first multitude of conductive probe arms each of the probe arms defining a proximal end and a distal end being positioned in co-planar relationship with the first surface of the supporting body. The probe arms are connected to the supporting body at the proximal ends thereof and have the distal ends freely extending from the supporting body, giving individually flexible motion to the first multitude of probe arms. The probe arms originate from a process of producing the probe arms on a wafer body in facial contact with the wafer body and removal of a part of the wafer body providing the supporting body and providing the probe arms freely extending therefrom. The multi-point probe further comprises a third multitude of tip elements extending from the distal end of the first multitude of probe arms. The tip elements originate from a process of metallization of electron beam depositions on the probe arms at the distal ends thereof.

Nano-drive for high resolution positioning and for positioning of a multi-point probe

Growing community of inventors

Farum, Denmark

Peter Folmer Nielsen