The United States of America As Represented by the United States

Other

Sandia Corporation

Peter Esherick

Jack L Jewell

Thomas Daniel Raymond

Randy J Shul

Carol I Ashby

Robert P Bryan

Albert G Baca

Gregory R Olbright

Kevin L Lear

Adelbert Owyoung

John E Parmeter

Dennis J Rieger

A method for dry etching of transition metals. The method for dry etching of a transition metal (or a transition metal alloy such as a silicide) on a substrate comprises providing at least one nitrogen- or phosphorous-containing .pi.-acceptor ligand in proximity to the transition metal, and etching the transition metal to form a volatile transition metal/.pi.-acceptor ligand complex. The dry etching may be performed in a plasma etching system such as a reactive ion etching (RIE) system, a downstream plasma etching system (i.e. a plasma afterglow), a chemically-assisted ion beam etching (CAIBE) system or the like. The dry etching may also be performed by generating the .pi.-acceptor ligands directly from a ligand source gas (e.g. nitrosyl ligands generated from nitric oxide), or from contact with energized particles such as photons, electrons, ions, atoms, or molecules. In some preferred embodiments of the present invention, an intermediary reactant species such as carbonyl or a halide ligand is used for an initial chemical reaction with the transition metal, with the intermediary reactant species being replaced at least in part by the .pi.-acceptor ligand for forming the volatile transition metal/.pi.-acceptor ligand complex.

Method for dry etching of transition metals

A monolithically integrated optoelectronic device is provided which integrates a vertical cavity surface emitting laser and either a photosensitive or an electrosensitive device either as input or output to the vertical cavity surface emitting laser either in parallel or series connection. Both vertical and side-by-side arrangements are disclosed, and optical and electronic feedback means are provided. Arrays of these devices can be configured to enable optical computing and neural network applications.

Integration of photoactive and electroactive components with vertical

A feedback stabilization system for pulse single longitudinal mode tunable lasers having an excited laser medium contained within an adjustable length cavity and producing a laser beam through the use of an internal dispersive element, including detection of angular deviation in the output laser beam resulting from detuning between the cavity mode frequency and the passband of the internal dispersive element, and generating an error signal based thereon. The error signal can be integrated and amplified and then applied as a correcting signal to a piezoelectric transducer mounted on a mirror of the laser cavity for controlling the cavity length.

Feedback stabilization system for pulsed single longitudinal mode

A system for locking two Nd:YAG laser oscillators includes an optical path for feeding the output of one laser into the other with different polarizations. Elliptical polarization is incorporated into the optical path so that the change in polarization that occurs when the frequencies coincide may be detected to provide a feedback signal to control one laser relative to the other.

Polarization feedback laser stabilization

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Albuquerque, NM, United States of America

Peter Esherick