Kla Tencor Corporation

Kla-Tencor Technologies Corporation

Peter Eldredge

Sandeep Bhagwat

Robinson Piramuthu

Martin Plihal

Patrick Huet

Maruti Shanbhag

Michael J Bellon

Jimmy Liao

Kai Liu

Bing Li

Kai Chi

Ilya Languev

Anthony Cheung

Charles Lai

Shaio Roan

Leslie F Smith

Po-Shou Liao

Felix Lai

Sino Ho

Benny Huang

Ellis E-Li Chang

An extensible data analysis system for analyzing integrated circuit fabrication data produced during integrated circuit fabrication, including an application tier that selectively runs analysis nodes. The application tier has an architecture for optionally including and excluding a desired selection of the analysis nodes. The application tier architecture allows the selection of the analysis nodes to be dynamically added by a user. A data access tier selectively runs data reader nodes. The data access tier has an architecture for optionally including and excluding a desired selection of the data reader nodes. The data reader nodes interpret a desired variety of data source files containing the integrated circuit fabrication data having different formats for access by the application tier. The data access tier architecture allows the selection of the data reader nodes to be dynamically added by the user.

Data analysis flow engine

A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

Spatial signature analysis

Growing community of inventors

Scotts Valley, CA, United States of America

Peter Eldredge