U.S. Philips Corporation

Peter E Asselbergs

Johan G Bakker

Andreas Th Engelen

Johannes A Cooijmans

A charged particle beam system utilizes a box-shaped cooling member accommodating the lens in order to cool the particle-optical lenses. The cooling medium is circulated between the wall of the lens and the wall of the cooling member, enabling a high transfer of heat by convection. By using a cooling liquid which is undersaturated for air and which is heated prior to its passage through the cooling duct, accumulation of air due to heating can be prevented in the cooling member.

Charged particle beam system and cooling device, a coil comprising a

A specimen holder for use in a charged particle beam device, notably an electron microscope, comprises a support and a resilient retaining element. The retaining element comprises a resilient ring which can be detached from the support or resilient tags which are attached to the support. A specimen is pressed against the support by the resilient retaining element. Such retaining of the specimen offers the advantage that the specimen can be readily disposed on the comparatively thin support and can be simply detached therefrom with a minimum risk of damaging.

Specimen holder for use in a charged particle beam device

In a vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto, the object carrier in one form is constructed to rotate about one axis relative to the housing or in a second form rotates about an orthogonal axis and which forms are interchangeable. A supporting element of the object carrier is driven by a push member or by a piezo-electric element in different embodiments. The object carrier is introduced through a lock in a side wall of the vacuum system and can be coupled to and uncoupled from the object holder by means of a special tool.

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Eindhoven, Netherlands

Peter E Asselbergs