Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Micronic Laser Systems Ab

Micronic Mydata Ab

Peter Dürr

Ulric Ljungblad

Thor Bakke

Martin Friedrichs

Andreas Neudert

Hubert Karl Lakner

Thomas Presberger

Alexander Mai

Ulric Llungblad

Linda Skatulla

Ingo Wullinger

Linda Felsberg

Torbjörn SANDSTRÖM

Jan Uwe Schmidt

A MEMS (micro-electromechanical system) actuator element includes a substrate, a stationary first electrode structure with an edge structure, a second electrode structure with an edge structure, wherein the second electrode structure is deflectably coupled to the substrate by means of a spring structure and electrostatically deflectable by means of the first electrode structure to move the edge structure of the second electrode structure into an intermediate position between a minimum and maximum vertical deflection position, wherein the minimum and maximum deflection position specify a maximum deflection path, wherein the edge structures of the first and second electrode structures are to each other and are vertically spaced apart in the minimum deflection position and wherein, in the maximum deflection position, the vertical immersion path of the edge structure of the second electrode structure into the edge structure of the first electrode structure is up to 0.5 times the maximum deflection path z.

MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements

Apparatus for generating an optical pattern from image points in an image plane, including: a control unit; a micro-mirror array; an illumination unit controllable by the control unit; a focusing unit; the control unit being configured to control one or several micro-mirror groups formed of several micro-mirrors of the multitude of micro-mirrors such that the centroid beams reflected at the micro-mirrors of one of the micro-mirror groups meet in the image plane, and such that optical path lengths of the centroid beams reflected at the micro-mirrors of the respective micro-mirror group are equal from the illumination unit up to the image plane or differ by an integer multiple of a wavelength of the light beams in order to generate an image point of the image points in such a way.

Apparatus and method for generating an optical pattern from image points in an image plane

The invention relates to arrangements of micromechanical elements, preferably microoptical elements, which are each held by means of spring elements. In this respect, they can be pivoted or also deflected in translation around a rotational axis by the effect of electrostatic forces. It is the object of the invention to provide an arrangement having micromechanical elements which can be operated over a long time period without drift without any frequent recalibration being necessary. The arrangement in accordance with the invention having micromechanical elements is made in this connection such that electrodes are likewise arranged beneath micromechanical elements, that is, on the side onto which no electromagnetic radiation can be directly incident. In this respect, a respective electrode is arranged and made such that it is associated with at least two micromechanical elements. It can in this connection effect a deflection of the micromechanical elements associated with it by electrostatic force effect. It is only necessary to set a suitable difference of the electrical voltage between the electrode and the respective micromechanical element for this purpose. Electrodes are arranged in the region of gaps of adjacent micromechanical elements for this purpose.

Arrangement of micromechanical elements

The present invention relates to a method to reduce charging effects affecting a degree of movement of at least one movable micro mirror in a spatial light modulator, said at least one movable micro mirror is electrostatically attractable to at least one electrode, including the action of attracting electrostatically said at least one micro mirror in a sequence of reversed electrical field between said micro mirror and said at least one electrode.

Addressing of an SLM

The present invention relates to a method to detect at least one defective pixel in a spatial light modulator comprising numerous pixel elements. The spatial light modulator is imaged to a detector. A relayed image of a first chess-board pattern of pixels in said spatial light modulator is detected by said detector. A relayed image of a second chess-board pattern of pixels in said spatial light modulator is detected, which is inverted to the first chessboard pattern, by said detector. The relayed images of said first and second chessboard patterns are analyzed to detect differences between said detected images and theoretical images thereof.

Method to detect a defective element

The present invention relates to a movable micro-element with reduced imprinting or hysteresis effect arranged spaced apart from a surface comprising at least one electrode. At least one restoring element is connected to said movable micro-element. An address electrode is arranged on said surface and capable to electrostatically attract said movable micro-element. Said address electrode is addressed to a first potential. Said movable micro-element is first set to a second potential defining a non addressed state and at a time period &#x394;t before a predetermined pulsed signal is emitted said movable micro-element is switched from said second potential to a third potential defining an addressed state. Said movable micro-element is kept in said addressed state for a time period of &#x394;t+&#x394;t'. The invention also relates to a Spatial Light Modulator (SLM), an apparatus for patterning a workpiece and a method of reducing an imprinting or hysteresis effect of a movable micro-element.

Growing community of inventors

Dresden, Germany

Peter Dürr