Ade Corporation

Zygo Corporation

Peter Domenicali

Noel S Poduje

Roy E Mallory

Robert C Abbe

Peter A Harvey

Alexander Belyaev

Randal K Goodall

Richard S Smith

An apparatus for providing tilt-free, linear micromotion translation of an object (12), such as an optical element, relative to a fixed rigid frame member (2) includes a flexural suspension (7) connected to the object (12) for enabling motion of the object (12) along a predetermined translational axis (18). The flexural suspension (7) includes a plurality of flexural links (14, 15) connecting a plurality of points (9) on the fixed rigid frame member (2) to a plurality of points (10) on a moving rigid frame member (11) with the links (14, 15) and the points (9, 10) connected by the links (14, 15) lying in a pair of parallel planes with an arrangement of links (14, 15) and fixed (9) and moving (10) points being disposed in each of the parallel planes and with the translational axis (18) being normal to the pair of parallel planes. The arrangements of the fixed (9) and moving (10) points are, disposed in the parallel planes for minimizing any undesirable cross axis translational motions (16, 17, 18) of the object (12). The apparatus also includes a linear motion transducer (32) and a drive mechanism (31) coupling linear motion transducer (32) to the flexural suspension (7) for enabling the tilt-free, linear micromotion translation of the object (12).

Tilt free micromotion translator

A measurement station which rotates a wafer in a vertical plane and moves a scanning sensor linearly along an axis which is parallel to the wafer rotation plane, thus providing a spiral, or other, scan path across the wafer. The vertical orientation reduces errors from weight induced sagging, especially of large, e.g. 300 mm wafers. The measurement station includes wafer grippers which move in the wafer's plane for securing the wafer in position for rotation. The measurement station also includes master calibration gauges which simplify calibration and obviate the need for calibration test wafers. A technique for reducing vibration and assuring scan repeatability includes coasting of the wafer in rotation and coordinated linear probe motions for scanning. Probe measurement data obtained is digitized early and calibration, demodulation, filtering and other processing is done digitally.

Wafer testing and self-calibration system

A system for semiconductor wafer processing including wafer measurement and characterization having vertical wafer processing apparatus with which only the edge of a wafer is contacted. A wafer processing station is provided having a support bridge to which a rotor subassembly is attached. The rotor subassembly includes a housing and a rotor having a central aperture and a retention mechanism for retaining a wafer in a measurement position. A pair of pivotable probe arms includes one probe arm positioned on either side of the wafer. A sensor provides an image of a wafer prior to its retention by the retention mechanism in the measurement position in order to permit the retention mechanism to avoid any flat on the wafer. Additional sensors eliminate the effect of wobble or vibration of the rotor on wafer measurement results. Artifact removal processors are provided for removing errors in the measured wafer data and a database stores the uncorrupted and corrected data. The system couples with a data network to allow global viewing of wafer processing trouble spots. A correlation of information from actual data and wafer processing simulation is provided for allowing the application of corrective measures before processes deviate beyond control or specification limits.

Wafer handling and processing system

Growing community of inventors

Montpelier, VT, United States of America

Peter Domenicali