Fisons Ltd.

Vg Systems Limited

Peter Coxon

Bryan Barnard

Bruce J McIntosh

H Sebastian Von Harrach

A spectrometer and method of spectroscopy are provided for surface analysis. The spectrometer comprises an energy analyser for analysing the energies of charged particles liberated from a sample, a lens arranged to project a diffraction image of the analysis area at the image plane of the lens and a detector for detecting the charged particles. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first direction according to their emission angles and are distributed along another direction according to their energies. The detector is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra.

Spectrometer and method of spectroscopy

The invention provides apparatus and methods for investigating a small selected area of the surface of a specimen. The specimen is irradiated by a primary beam of X-rays or electrons to cause it to emit electrons. These are collected by a novel electron-optical arrangement and are used to create an image of the selected area of the surface using only those electrons emitted with energies lying in a specified range. Apparatus according to the invention has greater sensitivity and spatial resolution than previously known apparatus.

Charged-particle analyzer

A charged particle analyzer which irradiates a specimen and analyzes charged particles emitted therefrom, for example a photo electron spectrometer, having a flood-source which emits charged particles to neutralize the charge which develops on a specimen. The analyzer is provided with electrostatic and magnetic lenses which may be used separately or in combination. The flood source is provided within the lens column of the analyzer and is arranged such that when the electrostatic lens is in use, the charged particles emitted by the flood source pass around the outside of the objective electrostatic lens element, whereas when the magnetic lens is in use, or when both lenses are in use, they pass through that element.

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Buxted, United Kingdom

Peter Coxon