Siemens Aktiengesellschaft

Peter-Christian Eccardt

Martin Vossiek

Kurt Niederer

Valentin Magori

Thomas Scheiter

Dieter Maier-Schneider

Nils Kroemer

Stefan Lechner

Thomas K&ouml;lpin

Nils Kromer

Celine Merel

The damping of membranes of ultrasound transducers in an arrangement occurs at the front side directly on the membranes by applying a polymer layer, whereby the working temperature dependent on the operating frequency of the ultrasound transducer lies within the glass transition range of the polymer layer.

Arrangement of micromechanical ultrasound transducers

A micromechanical, capacitative ultrasound transducer having a planar membrane is adapted such for manufacturing an air gap between membrane and cooperating electrode that the membrane collapses. The width of the air gap is thereby defined by nubs located on the membrane that lie against the cooperating electrode.

Micromechanical, capacitative ultrasound transducer and method for the manufacture thereof

A spacer layer (,) with a cavity (,) etched out therein and a diaphragm (,) arranged thereabove on the spacer layer are located on a silicon substrate (,) with a doped region (,) formed therein, whereby the doped region and the diaphragm are electrically connected via terminal contacts (,) to electronic components (,) that are likewise integrated in the substrate (,). The electronic component are a component part of the operating circuit that can also be used for the drive of the diaphragm and for evaluating the diaphragm oscillations. The integration makes it possible to arrange the micromachined transducer components as array that can be electronically driven as phased array.

Surface micromachined ultrasonic transducer

An identification of persons is conducted on the basis of the sweat gland channel structures in the horny layer of the skin of a finger. For that purpose, ultrasound waves are transmitted into the skin and the received echos are evaluated.

Method for the identification of persons

Adaptive optimization process for ultrasonic measurement signals

Method for determining the position of an object relative to the

Process for the recognition and separation of useful and interfering

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Ottobrunn, Germany

Peter-Christian Eccardt