Leybold Gmbh

Oerlikon Leybold Vaccum Gmbh

Oerlikon Leybold Vacuum Gmbh

Peter Birch

Robert Jenkins

Clive Tunna

Thomas Dreifert

Wolfgang Giebmanns

Roland Müller

Dieter Kolvenbach

Magnus Janicki

Otmar Cornely

Robert Jentkins

A vacuum pump comprises rotor elements arranged in a suction chamber. An outlet duct is connected to an exhaust pipe. For the purpose of silencing, sound expansion spaces are provided in the outlet duct, which are integrated into the pump housing. Alternatively or in addition to these sound expansion spaces, sound expansion spaces may be provided in an inlet duct which is used for the inlet of gas ballast, said sound expansion spaces being preferably likewise integrated into the pump housing.

Vacuum pump having a silencer

A dry vacuum pump, comprising a pump housing, which forms a plurality of suction chambers, wherein rotor elements are arranged in the suction chambers, in order to convey a pump medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each suction chamber. The rotor elements are connected to a rotor shaft. The rotor shaft is supported by bearings, wherein a high-vacuum-side bearing is arranged in a cut-out. A sealing device is arranged between the high-vacuum-side bearing and at least one suction chamber adjacent to the high-vacuum-side bearing. The cut-out is connected, by means of a first channel, to a region of the dry vacuum pump in which there is a higher pressure than in at least one suction chamber adjacent to the high-vacuum-side bearing.

Dry vacuum pump with pressurized bearing and seal

A Roots pump comprises a plurality of multi-toothed rotary pumps, each forming a pump stage, and connection channels connecting respective adjacent pump stages. The invention provides that the connection channels are arranged in partitioning walls separating the adjacent pump stages.

Roots pump connection channels separating adjacent pump stages

In order to provide a simple and energy-efficient rough pumping method for a displacement pump (), intended to generate a maximum differential pressure (&#x394;P) between the inlet () and the outlet () of the displacement pump (), the rotational speed (&#x3a9;) of the displacement pump () is adjusted such that the maximum differential pressure (&#x394;P) to be generated that the power input () of the displacement pump () approximates the minimum power () physically required for compressing the gas in order to establish the maximum differential pressure (&#x394;P).

Roughing pump method for a positive displacement pump

A screw vacuum pump, in particular for compression against atmospheric pressure, comprises a pump housing defining a suction chamber. Two meshing screw rotors are arranged in the suction chamber. Further, an overpressure outlet provided, which comprises an overpressure opening in a side wall of the suction chamber. Further, an overpressure valve is arranged in the overpressure outlet. The width (b) of the overpressure opening in the longitudinal direction of the screw rotors is smaller than or equal to a tooth width (B) of the screw rotors.

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Sussex, United Kingdom

Peter Birch