Aixtron, Inc.

Aixtron Se

Aixtron Ag

Eugenus, Inc.

Peter Baumann

Johannes Lindner

Marcus Schumacher

Gerhard Karl Strauch

Markus Reinhold

Piotr Strzyzewski

Marc Deschler

Antonio Mesquida Küsters

Timothy McEntee

Timothy Mcentee

A device for depositing at least one especially thin layer onto at least one substrate includes a process chamber housed in a reactor housing and includes a movable susceptor which carries the at least one substrate. A plurality of gas feed lines run into said process chamber and feed different process gases which comprise layer-forming components. Said process gases can be fed to the process chamber in subsequent process steps, thereby depositing the layer-forming components onto the substrate. In order to increase throughput, the process chamber is provided with a plurality of separate deposition chambers into which different gas feed lines run, thereby feeding individual gas compositions. The substrate can be fed to said chambers one after the other by moving the susceptor and depositing different layers or layer components.

Apparatus and method for high-throughput chemical vapor deposition

A gas distributor for a CVD or OVPD reactor comprises two or more gas volumes () into each of which opens a feed pipe () for a process gas, each gas volume () being connected to a plurality of corresponding process gas outlets () which open into the bottom () of the gas distributor. In order to increase the homogeneity of the gas composition, the two gas volumes () comprise pre-chambers () located in a first common plane () and a plurality of gas distribution chambers () each associated with a gas volume are provided in a second plane (') adjacent to the bottom of the gas distributor. The pre-chambers () and gas distribution chambers () associated with each gas volume () are connected with connection channels ().

Gas distributor with pre-chambers arranged in planes

The invention relates to a gas inlet element () for a CVD reactor with a chamber (), which has a multitude of bottom-side outlet openings (), via which a process gas introduced into the chamber () via edge-side access openings () exits into a process chamber () of the CVD reactor (). In order to homogenize the gas composition, the invention provides that at least one mixing chamber arrangement () is situated upstream from the access openings (), and at least two process gases are mixed with one another inside this mixing chamber arrangement.

Gas inlet element for a CVD reactor

The invention relates to a method for deposition of at least one layer containing at least one first component on at least one substrate in a process chamber, wherein first and second starting materials are introduced in gaseous form into the process chamber in alternation cyclically, at least the first starting material of which contains the first component, to deposit essentially only one layer of the first component in each cycle. To widen the spectrum of available starting materials suitable for the process, it is proposed that the first starting material shall consist of two &#x3b2;-diketones and one diene coordinated with one ruthenium atom, and a limiter shall be introduced into the process chamber simultaneously with or some time after the first starting material, such that deposition of the first component on the substrate is automatically concluded after the first layer is completed, wherein the limiter is or contains octane, butyl acetates, tetrahydrofuran, methanol, ethanol, isobutylamines, triethylamines, butanol, cyclohexane, isooctane, dioxane, dimethylformamide, pyridine and/or toluene.

Method for self-limiting deposition of one or more monolayers

The invention relates to a method for depositing at least one semiconductor layer on at least one substrate in a processing chamber (). Said semiconductor layer is composed of several components which are evaporated by non-continuously injecting a liquid starting material () or a starting material () dissolved in a liquid into a tempered evaporation chamber () with the aid of one respective injector unit () while said vapor is fed to the processing chamber by means of a carrier gas (). The inventive method is characterized in that the mass flow rate parameters, such as the preliminary injection pressure, the injection frequency, the pulse/pause ratio, and the phase relation between the pulses/pauses and the pulses/pauses of the other injector unit(s), which determine the progress of the mass flow rate of a first silicon-containing starting material and a germanium-containing second starting material () through the associated injector unit (), are individually adjusted or varied.

Process for depositing layers containing silicon and germanium

The invention relates to a method and device for depositing at least one layer on at least one substrate in a process chamber. Said layer comprises several components and is insulating, passivating or electrically conductive. The components are vaporized in a tempered vaporization chamber by means of non-continuous injection of a liquid starting material or a starting material dissolved in a liquid using a respective injector unit. Said vapor is guided to the process chamber by means of a carrier gas. It is important to individually adjust or vary the material flow parameters, such as injection frequency and the pulse/pause ratio and the phase relation of the pulse/pauses to the pulse/pauses of the other injector unit, determining the time response of the flow of material through each injector unit. The pressure in the process chamber is less than 100 mbars, the process chamber is tempered and several series of layers are deposited on the substrate during one process step.

Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit

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Aachen, Germany

Peter Baumann