Fujifilm Electronic Materials U.s.a., Inc.

Perry Westberg

Marcia Jo Cole-Yocom

Bryan Hinzie

Yuan Chen

Michael R Barker

Jack Helzer

A chemical liquid manufacturing apparatus, including a first system and a second system, is provided. The first system includes at least one first filtration medium, selected from a first filter, a first ion exchange membrane and a first ion adsorption membrane, wherein the first system is configured to process a material of at least one time. The second system includes at least one second filtration medium, selected from a second filter, a second ion exchange membrane and a second ion adsorption membrane, wherein the second system is configured for recirculation and to process the material of at least two times.

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Goodyear, AZ, United States of America

Perry Westberg