Axcelis Technologies, Inc.

Perry J I Justesen

William Davis Lee

Ashwin Madhukar Purohit

Robert D Rathmell

Allan D Weed

Gary M Cook

Robert J Mitchell

Ernest Everett Allen

Alexander F Pless

An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.

Heated electrostatic chuck including mechanical clamp capability at high temperature

A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.

Heated annulus chuck

An improved bellows assembly (,) is provided for use in, for example, an ion implanter (,). The bellows assembly comprises a first mounting portion (,) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (,); a second mounting portion (,) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (,); and a steel bellows (,) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (,) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (,) having a first wear plate (,), a second sliding plate (,) having a second wear plate (,), and an elastomeric seal (,) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.

Elastomeric sliding seal for vacuum bellows

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Beverly, MA, United States of America

Perry J I Justesen