Asyst Technologies, Inc.

Space Systems/loral, LLC

Perry Alan Peterson

William John Fosnight

James J Sowers

Anthony C Bonora

Frederick T Rosenquist

Raymond S Martin

Joshua W Shenk

David Max Solomon

Chihchien Lin

A power splitting (or combining) arrangement includes a waveguide having a plurality of output (or input) ports and an input (or output) port configured to receive (or transmit) electromagnetic waves having a frequency in a designated frequency band. Each output (or input) port is configured to electrically couple with an input (or output) terminal of a corresponding one of a plurality of active devices. Each output (or input) port has a respective output impedance associated with the frequency band. The power splitting (or combining) arrangement is configured such that the respective output (or input) impedance of each output (or input) port substantially matches an input (or output) impedance of the corresponding one of the plurality of active devices.

Waveguide to microstrip line N-port power splitter/combiner

A power combining arrangement includes an input divider waveguide and an output combiner waveguide, and a first and second amplifier. The power combining arrangement is configured to amplify RF energy having a characteristic wavelength &#x3bb;. The first amplifier has a first input electrically coupled with a first output port of the divider waveguide. The second amplifier has a second input electrically coupled with a second output port of the divider waveguide. The first and second output ports are separated by a first distance corresponding to a phase delay &#xd8;, the first distance being selected substantially independently of the characteristic wavelength. The first amplifier has a first output electrically coupled with a first input port of the combiner waveguide and the second amplifier has a second output electrically coupled with a second input port of the combiner waveguide. The first and second input ports are separated by the first distance.

Solid state traveling wave amplifier for space applications

A system is disclosed for ensuring a properly aligned position of a pod door within the opening in a pod shell upon location of the pod at a tool load port. The door positioning assembly according to the present invention includes a cam affixed to rotating latch hubs of a pod door latching assembly, and a cam follower mounted around each of the cams, which followers include arm portions that extend out toward an edge of the pod door. When the pod door and shell are separated, the arm portions are held in a retracted position completely contained within the footprint of the pod door. However, upon rejoining the pod door to the pod shell, mechanisms in the port door rotate the latch hub cams. Cam rotation causes translation of the arm portions of the cam followers so that the ends of the arm portions extend out beyond an edge of the pod door and against a surface of the pod shell. In their extended positions, the arm portions maintain a desired vertical positioning of the pod door within the pod shell opening. Moreover, as the arm portions remain in their extended positions after the pod door is coupled to the pod, the positioning assemblies prevent the door from sagging downward in the pod shell opening as a result of its own weight or as a result of a shock or jolt to the pod.

Pod door alignment device

A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support surface at the kinematic couplings will always remain at a fixed, controllable and repeatable position. The present invention makes use of this fact by supporting the cassette at or near the three kinematic coupling points. Moreover, the support structure is not affixed to the top or sides of the pod shell. Thus, the position of the cassette, and wafers supported therein, will similarly remain at a fixed, controllable and repeatable position, substantially unaffected by any pod shell deformation which may occur.

SMIF pod including independently supported wafer cassette

An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes in the support surface, through which gas may be injected into and removed from the pod, respectively. The interface according to the various embodiments of the invention provides a durable seal substantially preventing leakage between the pod and support surface while at the same time being compatible with kinematic couplings. In embodiments of the invention, the seal is thin and flexible, and expands into engagement with the pod to establish the seal. This type of interface seal will not interfere with the proper seating of the pod on the kinematic pins. Moreover, in a relaxed state, embodiments of the interface seal extend only a small distance above the support surface, and have no edges that are capable of catching on the pod as the pod is loaded or removed at low angles.

Growing community of inventors

Mountain View, CA, United States of America

Perry Alan Peterson