STMicroelectronics

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Stmicroelectronics (Crolles 2) Sas

Stmicroelectronics (Grenoble 2) Sas

Stmicroelectronics (Rousset) Sas

Perceval Coudrain

Jean-Philippe Colonna

Philippe Coronel

Maud Vinet

Jean Charbonnier

Yacine Felk

Candice Thomas

Rafael Augusto Prieto Herrera

Michel Marty

Fabrice Casset

Pierre Bar

Pascal Ancey

Laurent-Luc Chapelon

Pascale Mazoyer

Alexis Farcy

Benoit Besancon

Didier Campos

David Petit

Lionel Cadix

Alexandre Giry

Patrick Lamontagne

Pascal Reynier

Ayssar Serhan

Matthieu Bopp

Nicolas Buffet

Louis-Michel Collin

Luc Frechette

Rafael Prieto Herrera

An integration system and method for the manufacture of radio frequency transmission front-end modules with radio frequency integrated circuit(s) and self-biased magnetic component(s) integrated on a 'Wafer Level Packaging'-type technology. This integration makes it possible to design efficient, compact and low-cost front-end modules.

Radio frequency transmission front-end module and associated manufacturing method

An integrated structure intended to connect a plurality of semiconductor devices, the integrated structure including a substrate, a first face and a second face, the first face being intended to receive the semiconductor devices, the integrated structure including, at the first face, at least one routing level, the routing level or levels including: at least one first conductor routing track in a conductor material; and at least one first superconductor routing track made from a superconductor material.

Integrated structure with bifunctional routing and assembly comprising such a structure

A functional chip includes a substrate including a first face and a second face, the second face of the substrate forming the front face of the functional chip; a first oxide layer on the first face of the substrate; a second oxide layer on the first oxide layer; a first routing level formed on the surface of the second oxide layer in contact with the first oxide layer; a third oxide layer on the second oxide layer wherein a semiconductor component is inserted; a rear face formed by the surface of the third oxide layer opposite the second oxide layer, the rear face including superconductor routing tracks surrounded at least partially by one or more conductor routing tracks, the semiconductor component being connected to the superconductor routing tracks via superconductor vias and the conductor routing tracks of the rear face being connected to the routing level via conductor vias.

Chip with bifunctional routing and associated method of manufacturing

A method for manufacturing a cooling circuit on at least one integrated circuit chip includes producing a cooling circuit on a first face of the chip. Producing the cooling circuit includes forming a definition pattern of the cooling circuit on the first face of the chip, the pattern having at least one layer of a sacrificial material; coating the pattern with at least one resin layer; and at least partially removing the sacrificial material from the pattern so as to open the cooling circuit.

Method of manufacturing a cooling circuit on an integrated circuit chip using a sacrificial material

A heat-transferring device is formed by a stack that includes at least one heat-conducting layer and at least one heat-absorbing layer. The at least one heat-conducting layer has at least one heat-collecting section placed facing a heat source and at least one heat-evacuating section placed facing a heat sink. The at least one heat-absorbing layer includes a phase-change material. One face of the at least one heat-absorbing layer is adjoined to at least one portion of at least one face of the heat-conducting layer.

Heat-transferring and electrically connecting device and electronic device

An electronic device includes a support and a component in the form of an integrated circuit chip having a rear face mounted above a front face of the support and a front face opposite its rear face. A block is provided for at least partially encapsulating the component above the front face of the support. The device also includes at least one thermal dissipation member having a flexible sheet having at least two portions folded onto one another while forming at least one fold between them, these portions facing one another at least partly.

Electronic device provided with a thermal dissipation member

Electronic devices are manufactured using a collective (wafer-scale) fabrication process. Electronic chips are mounted onto one face of a collective substrate wafer. A collective flexible sheet made of a heat-conductive material comprising a layer containing pyrolytic graphite is fixed to extend over a collective region extending over the electronic chips and over the collective substrate wafer between the electronic chips. The collective flexible sheet is then compressed. A dicing operation is then carried out in order to obtain electronic devices each including an electronic chip, a portion of the collective plate and a portion of the collective flexible sheet.

Method for collective (wafer-scale) fabrication of electronic devices and electronic device

A three-dimensional integrated structure includes a first and a second element each having an interconnection part formed by metallization levels encased in an insulating region. The first and second elements are attached to one another by the respective interconnection parts. The first element includes an electrical connection via passing through a substrate. A thermal cooling system includes at least one cavity having a first part located in the insulating region of the interconnection part of the first element and a second part located in the insulating region of the interconnection part of the second element and at least one through channel extending from a rear face of the first element to open into the at least one cavity.

Process for producing a microfluidic circuit within a three-dimensional integrated structure, and corresponding structure

The invention relates to a method for producing an interconnection pad on a conducting element comprising an upper face and a side wall; the method being executed from a substrate at least the upper face of which is insulating; the conducting element going through at least an insulating portion of the substrate, the method being characterized in that it comprises the sequence of the following steps: a step of embossing the conducting element, a step of forming, above the upper insulating face of the substrate, a stack of layers comprising at least one electrically conducting layer and one electrically resistive layer, a step of partially removing the electrically resistive layer, a step of electrolytic growth on the portion of the electrically conducting layer so as to form at least one interconnection pad on said conducting element.

Method for manufacturing a conducting contact on a conducting element

A three-dimensional integrated structure is fabricated by assembling at least two parts together, wherein each part contains at least one metallic line covered with a covering region and having a free side. A cavity is formed in the covering region of each part, that cavity opening onto the metallic line. The two parts are joined together with the free sides facing each other and the cavities in each covering region aligned with each other. The metallic lines are then electrically joined to each other through an electromigration of the metal within at least one of the metallic lines, the electromigrated material filling the aligned cavities.

Process for assembling two parts of a circuit

The integrated circuit comprises a support substrate having opposite first and second main surfaces. A cavity passes through the support substrate and connects the first and second main surfaces. The integrated circuit comprises a device with a mobile element, the mobile element and a pair of associated electrodes of which are included in a cavity. An anchoring node of the mobile element is located at the level of the first main surface. The integrated circuit comprises a first elementary chip arranged at the level of the first main surface and electrically connected to the device with a mobile element.

Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element

A method for forming a level of a tridimensional structure on a first support in which components are formed, including the steps of forming, on a second semiconductor support, a single-crystal semiconductor substrate with an interposed thermal oxide layer; placing the free surface of the single-crystal semiconductor substrate on the upper surface of the first support; eliminating the second semiconductor support; and thinning down the thermal oxide layer down to a thickness capable of forming a gate insulator.

Method for forming an integrated circuit level by sequential tridimensional integration

A resonant device including a stack of a first metal layer, a piezoelectric material layer, and a second metal layer formed on a silicon substrate, a cavity being formed in depth in the substrate, the thickness of the silicon above the cavity having at least a first value in a first region located opposite to the center of the stack, having a second value in a second region located under the periphery of the stack and having at least a third value in a third region surrounding the second region, the second value being greater than the first and the third values.

Bulk acoustic wave resonator disposed on a substrate having a buried cavity formed therein providing different substrate thicknesses underneath the resonator

A process for assembling two parts of an integrated electronic circuit has two successive steps. During a first step, the two circuit parts are made into a single unit by molecular bonding, realized on respective application surfaces of the two parts. During a second step, electrical connections are formed from connection portions already present in the application surfaces of the two circuit parts. The connections formed extend across the bonding interface, and are compatible with a high reliability and a high level of integration of the circuit.

Assembly of two parts of an integrated electronic circuit

A semiconductor structure including a first active area under which is buried a first reflective layer and a least one second active area under which is buried a second reflective layer, wherein the upper surface of the second reflective layer is closer to the upper surface of the structure than the upper surface of the first reflective layer.

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Grenoble, France

Perceval Coudrain