Inficon Gmbh

Balzers Aktiengellschaft

Per Björkman

Martin Wüest

Jarkko Antila

Urs Wälchli

Hansjakob Hanselmann

Heikki Saari

Walter Christian Berner

Carsten Strietzel

Stanislav Duris

Oskar Untermarzoner

Urs Walchli

Gaétan Duplain

Tove Manselin

Bjorgvin Hjorvarsson

The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S) an amorphous metal () on a surface of an object (); forming (S) a continuous layer of the amorphous metal () on the surface of the object (); binding (S) the amorphous metal () to the surface of the object by chemical binding; and passivation (S) of a surface of the amorphous metal () facing away from the surface of the object ().

Method for preventing gases and fluids to penetrate a surface of an object

A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.

Diaphragm pressure measuring cell arrangement

Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm () at a spacing a first housing plate () is disposed sealing in the margin region with a joining means (), and that on the other side of the diaphragm () at a spacing a second housing plate () is disposed sealing in the margin region with a joining means (), and that the second housing plate () has an opening at which a connection means () is disposed sealing with joining means () for the connection of the measuring cell () with the medium to be measured, wherein the diaphragm () and the two housing plates () are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber (), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber () and the opening with the connection means () is covered with a protective layer () such that at least the joining means () for the diaphragm () is protectively covered against corrosion.

Diaphragm vacuum measuring cell and method for the production of such measuring cell

A manufacturing method for a vacuum measuring cell provides first and second AlOceramic or sapphire housing bodies on opposite sides of an AlOceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

Optical interferometric pressure sensor manufacturing method

A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.

Shield arrangement for a vacuum cell

A vacuum measuring cell has a first housing body and a membrane, both of AlOceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of AlOceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

Optical interferometric pressure sensor

In order to cover a large measuring range extending from about 10.sup.-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) which, together with the support plate (5), forms a capacitive measuring element for the determination of pressures between about 0.1 mbar and 10 bar, and two measuring wires (11, 12) which are arranged adjacent to the membrane (6) and constitute a Pirani measuring element with substantial compensation of the effect of the wall temperature, for the determination of pressures between about 10.sup.-6 mbar and 1 mbar. The membrane (6) is shielded from the radiation of the measuring wires (11, 12) by a protective ring (16).

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Pålsböle, Finland

Per Björkman