Xidian University

Pengfei Deng

Yuming Zhang

Hui Guo

Keji Zhang

Tianmin Lei

Fengqi Zhang

Disclosed is a method for preparing structured graphene on a SiC substrate on the basis of Clreaction, the procedures are as follows: firstly, performing standard cleaning to a SiC sample chip; depositing a layer of SiOon the surface of the SiC sample chip and engraving a figure window on the SiOlayer; then arranging the windowed sample chip in a quartz tube, introducing a mixed gas of Ar and Clinto the quartz tube, reacting the bare SiC with Clfor 3-8 min at 700-1100&#xb0; C. to generate a carbon film; arranging the generated carbon film in Ar gas, annealing for 10-30 min at 1000-1200&#xb0; C. to generate the structured graphene on the window on the carbon film. The method is simple and safe; the generated structured graphene has a smooth surface and low porosity and can be used for making microelectronic devices.

[object Object]

Provided is a process for preparing graphene on a SiC substrate, based on metal film-assisted annealing, comprising the following steps: subjecting a SiC substrate to a standard cleaning process; placing the cleaned SiC substrate into a quartz tube and heating the quartz tube up to a temperature of 750 to 1150&#xb0; C.; introducing CClvapor into the quartz tube to react with SiC for a period of 20 to 100 minutes so as to generate a double-layered carbon film, wherein the CClvapor is carried by Ar gas; forming a metal film with a thickness of 350 to 600 nm on a Si substrate by electron beam deposition; placing the obtained double-layered carbon film sample onto the metal film; subsequently annealing them in an Ar atmosphere at a temperature of 900 to 1100&#xb0; C. for 10-30 minutes so as to reconstitute the double-layered carbon film into double-layered graphene; and removing the metal film from the double-layered graphene, thereby obtaining double-layered graphene. Also provided is double-layered graphene prepared by said process.

Process for preparing graphene on a SiC substrate based on metal film-assisted annealing

A method for preparing graphene by reaction with Clbased on annealing with assistant metal film is provided, comprising the following steps: applying normal wash to a Si-substrate, then putting the Si-substrate into a reaction chamber of a CVD system and evacuating, rising the temperature to 950&#xb0; C.-1150&#xb0; C. gradually, supplying CHand carbonizing the Si-substrate for 3-10 min; rising the temperature to 1150&#xb0; C.-1350&#xb0; C. rapidly, supplying CHand SiH, growing a 3C&#x2014;SiC hetero-epitaxial film on the carbonized layer, and then reducing the temperature to ambient temperature under the protection of Hgradually, introducing the grown sample wafer of 3C&#x2014;SiC into a quartz tube, heating to 700-1100&#xb0; C., supplying mixed gas of Ar and Cl, and reacting Clwith 3C&#x2014;SiC to generate a carbon film, applying the sample wafer of carbon film on a metal film, annealing at 900&#xb0; C.-1100&#xb0; C. for 10-30 min to reconstruct the carbon film into graphene; and taking out of the metal film from the sample wafer of graphene to obtain large area graphene. The graphene obtained by the method has large area, smooth surface, good continuity, and low porosity; and the product can be used to seal gas and liquid.

Growing community of inventors

Xi'an, China

Pengfei Deng