Harbin Institute of Technology

PengCheng Hu

Jiubin Tan

Xiaobo Su

Ruitao Yang

Hongxing Yang

Chen Zhang

Yisi Dong

Haijin Fu

Ziqi Yin

Liang Yu

JiWen Cui

JianWei Wu

Jinran Zhang

Wenrui Luo

Wenwen Li

ZhongPu Wen

Yan Wang

Xin Yang

Yun Zou

Zhiwei Wang

Zhaochen Pan

Hao Sun

Jing Li

Shiyuan Lin

Yin Zhang

Xizheng Liu

Xionglei Lin

A heterodyne laser interferometer and a measurement method based on an integrated dual polarization beam-splitting assembly is provided. Technical points: The first polarization beam splitter and the second polarization beam splitter of the integrated dual polarization beam-splitting assembly are arranged in parallel. The first polarization beam splitter is attached with a first polarizer, a third polarizer, and a first quarter-wave plate; The second polarization beam splitter is attached with a second polarizer, a fourth polarizer, and a second quarter-wave plate; The output optical path of the first quarter-wave plate and the second quarter-wave plate is equipped with target mirrors, while the output optical path of the third quarter-wave plate and the fourth quarter-wave plate is equipped with photodetectors. The assembly and adjustment of the present invention is more flexible and reduce the processing difficulty and processing error.

Heterodyne laser interferometer based on integrated dual polarization beam-splitting assembly and measurement method thereof

A differential proportional temperature measurement circuit and method based on bidirectional constant voltage drive is proposed. The circuit and method applied to the precision temperature measurement of spacecraft, the main components include a bidirectional constant voltage source proportional bridge circuit, a differential and single-ended amplifier circuit, an analog-to-digital conversion circuit, a digital filter circuit, a data processing circuit and an isolated filter power supply circuit. The method adopts the bidirectional constant voltage drive technology, and enlarges and measures the difference between the voltage values of the reference resistor and the resistance to be measured by improving the sensing bridge of the ordinary commutation proportional method, and suppresses the long-term drift of the excitation unit and the voltage measurement unit. The method can meet the requirements of temperature measurement resolution of μK magnitude and the power spectral density of μK/Hz(0.1 mHz-1 Hz) magnitude in aerospace temperature measurement systems.

Differential proportional temperature measurement circuit and method based on bidirectional constant voltage drive

A distance measurement device and method based on secondary mixing of inter-mode self-interference signals of optical frequency combs are provided, which relate to the field of high precision laser distance measurement technologies. A dual-comb light source emits a dual-comb laser into a detection optical module to obtain the inter-mode self-interference signals carrying the to-be-measured distance information. The detection optical module outputs the inter-mode self-interference signals into a generation, acquisition and calculation module of inter-mode self-interference secondary mixing signals to generate the inter-mode self-interference secondary mixing signals, to thereby achieve signal acquisition and obtain a distance measurement result. In this device, coarse and fine distance measurements at different scales are achieved, measurement range and accuracy can be effectively balanced by combing intermediate transition measurement scales and inter-stage transition method, strong real-time property of measurement is achieved, and the light source has low cost and the scale of the system is small.

Distance measurement device and method based on secondary mixing of inter-mode self-interference signals of optical frequency combs

A micro-probe laser frequency modulation interferometric ranging method and system, under the premise of not introducing an absolute laser rangefinder to introduce new uncertainties, continuously and slowly changes the modulated laser wavelength, resulting in a continuous periodic phase change in the interference signal obtained by the detector. The laser modulation absorption spectrum shifts from the initial locked absorption peak to another locked peak, and the wavelength changes of the two locked absorption peaks before and after are obtained by checking the table. Meanwhile, calculating the phase difference demodulated by the phase generated carrier (PGC) before and after, and the initial length of optical dead-path is calculated using wavelength scanning technology. Afterwards, utilizing the advantages of high relative distance measurement accuracy of micro-probe fiber optic laser interferometer, real-time measurement of the measured distance is achieved.

Micro-probe laser frequency modulation interferometric ranging method and system

A heterodyne interferometer and a measurement method based on multi-target opposite displacement measurement are provided, technical points including: An output path of the laser source is sequentially arranged with a first beam splitter and a second beam splitter arranged in parallel on left and right sides, and both of which are polarization beam splitters; a first reflector is arranged above the first beam splitter, a third reflector is arranged on a right side of the second beam splitter, a second plane reflector is arranged in front of the second beam splitter, and a first plane reflector is arranged behind the second beam splitter; the first plane reflector and the second plane reflector jointly constitute a second reflector group; a left side of the first beam splitter is provided with a first photodetector and a second photodetector. The present invention realizes the measurement of relative displacement between opposing objects.

Heterodyne interferometer based on multi-target opposite displacement measurement and measurement method thereof

A frequency stabilization method and system for tunable light sources based on characteristic curve reconstruction are provided, which relate the field of frequency stabilization technologies of modulation absorption spectrum. A set of frequency stabilization control method and system based on internal modulation absorption spectroscopy of light source is constructed, and a high-precision laser frequency stabilization method under large-amplitude and high-bandwidth frequency modulation based on frequency discrimination curve reconstruction is proposed to solve a problem that it is difficult for micro-probe laser interferometry measurement benchmark to balance large-amplitude and high-bandwidth frequency modulation, and high-precision frequency stabilization, resulting in that it is difficult to obtain high relative accuracy measurement under large-range measurement. Under the large-amplitude and high-bandwidth frequency modulation, a distortion model of the frequency discrimination curve and a distortion correction model are constructed, which is used for feedback adjustment of phase compensation and reconstructing the frequency discrimination curve.

Frequency stabilization method and system for tunable light sources based on characteristic curve reconstruction

An interferometric displacement measurement system and method based on phase modulation of polarized light of micro probe are provided. An electro-optic phase modulator is used to perform sinusoidal phase modulation on a light beam emitted by a semiconductor laser to obtain an adjusted light beam. The adjusted light beam is divided by a polarization beam splitter to generate a reference light beam and a measurement light beam. The two light beams are respectively reflected by a built-in reflection surface of a micro probe and a target mirror, and transmitted to a polarization-maintaining fiber circulator. The reference light beam interferes with the measurement light beam at a fiber optic polarization element to generate an interference light signal. A photodetector converts the interference light signal into an interference electrical signal, and the interference electrical signal is demodulated by a signal demodulator to obtain a displacement value of the target mirror.

Interferometric displacement measurement system and method based on phase modulation of polarized light of micro probe

The present disclosure provides a multi-frequency hybrid heterodyne laser tracker system based on a single light source. According to the laser tracking system proposed in the present disclosure, multi-frequency laser is obtained by conducting multi-acousto-optic frequency shift on a dual-longitudinal-mode laser unit, and an absolute ranging precision gauge is constructed by using a dual-longitudinal-mode interval of a light source. With the frequency shift difference of a multi-acousto-optic frequency shifter, an absolute ranging roughness gauge is constructed, and the relative displacement measurement of dual-frequency light interference is achieved. Meanwhile, by utilizing the reflection of multiple reflectors and light splitting and combining of polarization prisms, synchronous measurement of multi-wavelength absolute distance, relative displacement and PSD position is achieved, resolving the problem that an existing laser tracker uses multiple light sources, which leads to difference in measurement datum, and consequently to the difficultly in traceback.

Multi-frequency hybrid heterodyne laser tracker system based on single light source

A single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector. A single-frequency laser beam is input to a Michelson interference structure, the measurement beam and the reference beam perform non-coaxial interference and form a single-beam homodyne interference signal by setting the angle of a reference plane mirror, the array detector is selected to effectively receive the single-beam homodyne interference signal, and finally, three-degree-of-freedom signal linear decoupling on the single-beam homodyne interference signal is achieved through a three-degree-of-freedom decoupling method based on Lissajous ellipse fitting. The laser interferometer does is free of angle decoupling nonlinearity, the period nonlinear error is remarkably reduced, compared with other existing three-degree-of-freedom laser interferometers, the laser interferometer has the advantages of being simple in structure, large in angle measurement range and easy to integrate, and the high-precision requirement of the three-degree-of-freedom laser interferometer for displacement and angle measurement is met.

Single-beam three-degree-of-freedom homodyne laser interferometer based on array detector

The disclosure provides a high-frequency-reproducibility laser frequency stabilization method and device based on multi-point acquisition of laser tube temperature. The laser frequency stabilization device includes: a frequency stabilization control circuit. The frequency stabilization control circuit includes a polarizing beam splitter, an optical power conversion circuit, an A/D conversion circuit, a temperature measuring circuit, a microprocessor, a D/A converter and a heating film driver. The polarizing beam splitter is disposed outside any one of laser transmitting holes. The optical power conversion circuit is disposed on reflection and refraction optical paths of the polarizing beam splitter. The optical power conversion circuit, the A/D conversion circuit, the microprocessor, the D/A converter, the heating film driver and a plurality of groups of heating films are sequentially in one-way connection. Temperature sensors, the temperature measuring circuit and the microprocessor are sequentially in one-way connection.

High-frequency-reproducibility laser frequency stabilization method and device based on multi-point acquisition of laser tube temperature

An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs () are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail () and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Air suspension support and motion guiding device having unequal-depth throttling chambers

Disclosed is a heterodyne laser interferometer based on an integrated secondary beam splitting component, which belongs to the technical field of laser application; the disclosure inputs two beams that are spatially separated and have different frequencies to the heterodyne laser interferometer based on the integrated secondary beam splitting component, wherein the integrated secondary beam splitting component includes two beam splitting surfaces that are spatially perpendicular to each other; and the two beam splitting surfaces are plated with a polarizing beam splitting film or a non-polarizing beam splitting film, and a measurement beam and a reference beam are the same in travel path length in the integrated secondary beam splitting component. The heterodyne laser interferometer of the disclosure significantly reduces periodic nonlinear errors, has the advantages of simple structure, good thermal stability, large tolerance angle and easy integration and assembly compared with other existing heterodyne laser interferometers with spatially separated optical paths, and meets the high-precision and high-resolution requirements of high-end equipment on heterodyne laser interferometry.

Heterodyne laser interferometer based on integrated secondary beam splitting component

A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

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Harbin, China

PengCheng Hu