Entegris, Inc.

Viavi Solutions Inc.

Advanced Technology Materials, Inc.

Smiths Detection Inc.

Peng Zou

Joseph D Sweeney

Oleg Byl

Robert E Kaim

Ying Tang

Sharad N Yedave

Edward Edmiston Jones

Barry Lewis Chambers

Richard S Ray

Thomas H Baum

Jose I Arno

Curtis Ross Hruska

Marc K Von Gunten

Lan Sun

Changmeng Hsiung

Valton Smith

Steven M Lurcott

Benjamin F Catching

Steven M Bilodeau

Luping Wang

J Donald Carruthers

Karl E Boggs

Donald D Ware

Christopher G Pederson

Shaun M Wilson

Peter Wrschka

Paul J Marganski

Greger Andersson

Kevin Judge

John E Q Hughes

Brian Bobita

Maxim Frayer

Douglas Edwards

Joseph Robert Despres

Shkelqim Letaj

David W Schiering

Juan Ivaldi

Dustin Levy

John EQ Hughes

A spectroscopic assembly may include a spectrometer. The spectrometer may include an illumination source to generate a light to illuminate a sample. The spectrometer may include a sensor to obtain a spectroscopic measurement based on light, reflected by the sample, from the light illuminating the sample. The spectroscopic assembly may include a light pipe to transfer the light reflected from the sample. The light pipe may include a first opening to receive the spectrometer. The light pipe may include a second opening to receive the sample, such that the sample is enclosed by the light pipe and a base surface when the sample is received at the second opening. The light pipe may be associated with aligning the illumination source and the sensor with the sample.

Light pipe for spectroscopy

A device may receive information identifying results of a spectroscopic measurement of an unknown sample. The device may perform a first classification of the unknown sample based on the results of the spectroscopic measurement and a global classification model. The device may generate a local classification model based on the first classification. The device may perform a second classification of the unknown sample based on the results of the spectroscopic measurement and the local classification model. The device may provide information identifying a class associated with the unknown sample based on performing the second classification.

Identification using spectroscopy

A device may receive training spectral data associated with a manufacturing process that transitions from an unsteady state to a steady state. The device may generate, based on the training spectral data, a plurality of iterations of a support vector machine (SVM) classification model. The device may determine, based on the plurality of iterations of the SVM classification model, a plurality of predicted transition times associated with the manufacturing process. A predicted transition time, of the plurality of predicted transition times, may identify a time, during the manufacturing process, that a corresponding iteration of the SVM classification model predicts that the manufacturing process transitioned from the unsteady state to the steady state. The device may generate, based on the plurality of predicted transition times, a final SVM classification model associated with determining whether the manufacturing process has reached the steady state.

Endpoint detection in manufacturing process by near infrared spectroscopy and machine learning techniques

A method includes decomposing a training set to obtain a principal component matrix having a plurality of principal component vectors. The method also includes variably rejecting portions of a sample spectrum vector that do not correspond to a selected one of the plurality of principal component vectors by incrementally providing a coefficient indicative of the weighting of the selected principal component vector for selected sub-regions. A corrected spectrum vector can be obtained by excluding certain sub-regions of the sample spectrum vector and corresponding principal component vector, multiplying the sample spectrum vector with the principal component matrix for non-excluded sub-regions, providing a predicted interference vector, and subtracting the predicted interference vector from the sample spectrum vector.

Estimation of water interference for spectral correction

A spectroscopic scanning device, a portable spectroscopic scanning system, and methods for using the spectroscopic scanning device are described that include at least one focusing element configured to collect light, a beam-steering element configured to direct a portion of the collected light from the at least one focusing element, and a detector configured to receive the directed light from the beam-steering element, wherein the beam-steering element is operable to successively select portions of light from a plurality of locations within its field of regard.

Raster optic device for optical hyper spectral scanning

Systems and techniques for optical spectrometer detection using, for example, IR spectroscopy components and Raman spectroscopy components are described. For instance, a system includes a first electromagnetic radiation source configured to illuminate a sample with a first portion of electromagnetic radiation in a first region of the electromagnetic spectrum (e.g., an IR source) and a second electromagnetic radiation source configured to illuminate a sample with a second portion of electromagnetic radiation in a second substantially monochromatic region of the electromagnetic spectrum (e.g., a laser source). The system also includes a detector module configured to detect a sample constituent of a sample by analyzing a characteristic of electromagnetic radiation reflected from the sample associated with the first electromagnetic radiation source and a characteristic of electromagnetic radiation reflected from the sample associated with the second electromagnetic radiation source.

Dual spectrometer

An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of BF. Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use.

Isotopically-enriched boron-containing compounds, and methods of making and using same

Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.

Fluid processing systems and methods

Apparatus and method for monitoring a vapor deposition installation in which a gas mixture can undergo gas phase nucleation (GPN) and/or chemically attack the product device, under process conditions supportive of such behavior. The apparatus includes a radiation source arranged to transmit source radiation through a sample of the gas mixture, and a thermopile detector assembly arranged to receive output radiation resulting from interaction of the source radiation with the gas mixture sample, and to responsively generate an output indicative of onset of the gas phase nucleation and/or chemical attack when such onset occurs. Such monitoring apparatus and methodology is useful in tungsten CVD processing to achieve high rate tungsten film growth without GPN or chemical attack.

TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same

An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.

Component for solar adsorption refrigeration system and method of making such component

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Ridgefield, CT, United States of America

Peng Zou