Phase Sensitive Innovations, Inc.

University of Delaware

Peng Yao

Dennis W Prather

Janusz A Murakowski

Shouyuan Shi

Andrew Mercante

This disclosure is directed to two-dimensional conformal optically-fed phased arrays and methods for manufacturing the same. The method includes providing a substrate, depositing a first cladding layer on the substrate, and depositing a core layer on the first cladding layer. The method further includes photolithographically patterning the core layer to provide a plurality of optical waveguide cores, and depositing a second cladding layer on the core layer to cover the plurality of optical waveguide cores to provide a plurality of optical waveguides. In addition, the method includes forming a plurality of antennas on the second cladding layer, each antenna of the plurality of antennas located near a termination of a corresponding optical waveguide of the plurality of optical waveguides, and providing a plurality of photodiodes on the second cladding layer, each photodiode of the plurality of photodiodes connected to a corresponding antenna.

Two-dimensional conformal optically-fed phased array and methods of manufacturing the same

A lithium niobate on insulator (LNOI) optical waveguide including a first region, a second region, and a third region, a substrate layer extending across the first region, the second region, and the third region, and a first cladding layer disposed on the substrate layer across the first region, the second region, and the third region. The LNOI optical waveguide further includes a lithium niobate (LN) layer disposed on the first cladding layer across the first region and the second region. The LN layer has a planar surface in the first region and a vertically tapered surface in the second region, and a dielectric strip in contact with the LN layer across the first region and the second region, and in contact with the first cladding layer across the third region.

Lithium niobate on insulator (LNOI) vertically tapered optical waveguide and method of forming the same

This disclosure is directed to two-dimensional conformal optically-fed phased arrays and methods for manufacturing the same. The method includes providing a wafer substrate, depositing a first cladding layer on the wafer substrate, and depositing a core layer on the first cladding layer. The method further includes photolithographically patterning the core layer to provide a plurality of optical waveguide cores, and depositing a second cladding layer on the core layer to cover the plurality of optical waveguide cores to provide a plurality of optical waveguides. In addition, the method includes forming a plurality of antennas on the second cladding layer, each antenna of the plurality of antennas located near a termination of a corresponding optical waveguide of the plurality of optical waveguides, and providing a plurality of photodiodes on the second cladding layer, each photodiode of the plurality of photodiodes connected to a corresponding antenna.

A photodiode device and method of manufacturing the same are disclosed. A stack of functional layers of the photodiode device, formed of crystalline semiconductor material, may be formed on a highly thermally conductive substrate, such as diamond or SiC. The stack of functional layers may be in contact with or close proximity to the thermally conductive substrate to thereby provide an efficient thermal conductive path between the functional layers and an external source, thereby mitigating problems that may result from overheating the photodiode device.

Photodiodes formed on a thermally conductive layer and, photodiode systems

A photodiode device and method of manufacturing the same are disclosed. A stack of functional layers of the photodiode device, formed of crystalline semiconductor material, may be formed on a diamond substrate. The stack of functional layers may be in contact with or close proximity to the diamond substrate to thereby provide an efficient thermal conductive path between the functional layers and an external source, thereby mitigating problems that may result from overheating the photodiode device.

Diamond-backed photodiodes, diamond-sandwiched photodiodes, photodiode systems and related methods of manufacture

A phased antenna array comprises a plurality of antennas and photodiodes arranged on a substrate. Each antenna is driven by an electrical signal output by the photodiode. The photodiodes each receive an optical signal via an optical fiber. The optical fibers conform to the sheet-like shape of the antenna array (which may be planar or curved) and optically communicate with a corresponding photodiode via a corresponding reflector, such as a ninety degree reflector. The reflectors may comprise a v-groove in a silicon substrate on which the optical fiber is positioned and a reflecting surface. Each reflector may be attached to the substrate or a ground plane positioned parallel to the substrate and the optical fiber may connect to the reflector in a direction running parallel to the phased antenna array. This optical feed network may accommodate tight spacing of the antenna elements (such as spacing less than 5 mm apart) with a thin profile.

Phased-array antenna with in-plane optical feed and method of manufacture

A method and article of manufacture for three-dimensional structures having micron dimensions includes coating a substrate with layers of photo resist. Each layer of photo resist is exposed with its own two-dimensional mask defining one slice of an object. Subsequent layers of photo resist are exposed with different patterns. Once all layers have been fabricated and exposed to identify two-dimensional features for the layer, the multiple layers are developed to removed photo resist which has not been exposed. The layered structure represents a three-dimensional object where the depth dimension is defined by the photo resist layer thickness. By decreasing the wavelength of the light exposure, it is possible to confine exposure to a single layer of photo resist.

Method for making three-dimensional structures on a substrate having micron dimensions, and an article of manufacture three-dimensional objects on a substrate with micron dimensions

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Newark, DE, United States of America

Peng Yao