Nxp Usa, Inc.

Peng Shao

Lianjun Liu

Andrew C McNeil

Aaron A Geisberger

An angular rate sensor includes first, second, third, and fourth proof masses spaced apart from a surface of a substrate, each of the first, second, third, and fourth proof masses being configured to move along first and second transverse axes parallel to the surface of the substrate. A first coupling structure is interposed between and interconnects the first and second proof masses. A second coupling structure is interposed between and interconnects the second and third proof masses. A third coupling structure is interposed between and interconnects the third and fourth proof masses. A fourth coupling structure is interposed between and interconnects the fourth and first proof masses. The first, second, third, and fourth coupling structures are configured to constrain an in-phase motion of adjacent ones of the first, second, third, and fourth proof masses along the first and second transverse axes.

Angular rate sensor with centrally positioned coupling structures

A device includes a substrate, a first electrode formed on the substrate and a structural layer formed on the substrate. The structural layer includes a movable mass and a fixed portion, the movable mass being suspended above the substrate and the first electrode being interposed between the substrate and the movable mass. A second electrode is spaced apart from an upper surface of the movable mass by a gap and an anchor couples the second electrode to the fixed portion of the structural layer. A method entails integrating formation of the second electrode into a wafer process flow in which the first electrode and the structural layer are formed.

Sensor device and method of fabrication

A MEMS device includes a first inertial mass system having first drive and sense masses elastically coupled to one another and a second inertial mass system having second drive and sense masses elastically coupled to one another. The first and second drive masses undergo antiphase drive motion along a first axis parallel to the surface of the substrate. First and second sense springs anchor and suspend first and second sense masses spaced apart from the surface of the substrate. The first and second sense springs enable antiphase sense motion of the first and second sense masses along a second axis parallel to the surface in response to an angular rotation about a third axis perpendicular to the surface. The first and second sense springs further enable in-phase sense motion of the first and second sense masses along the second axis in response to a linear acceleration along the second axis.

Multiple axis sensing device based on frequency modulation and method of operation

An angular rate sensor includes four Coriolis masses, configured such that the Coriolis masses move along perpendicular drive and sense axes, and a lever mechanism having first and second sets of levers. The first set of levers is coupled outside a boundary of the Coriolis masses, and the second set of levers is coupled within a boundary of the first set of levers and between the Coriolis masses. The second set of levers is configured to produce an anti-phase drive mode motion of the Coriolis masses along the drive axis. The first set of levers is configured to allow an anti-phase sense mode motion of the Coriolis masses along the sense axis responsive to the angular rate sensor rotating around an input axis that is perpendicular to the drive and sense axes. The first and second sets of levers are configured to constrain an in-phase motion of the Coriolis masses.

Angular rate sensor with in-phase motion suppression structure

A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.

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Chandler, AZ, United States of America

Peng Shao