Taiwan Semiconductor Manufacturing Comp. Ltd.

Pei-Jen Wang

Ching-Hung Kao

Tzy-Kuang Lee

Meng-Chang Ho

Kun-Mao Wu

A method of forming a capacitor is disclosed. The method includes forming a portion of a metallization layer on a substrate, forming a via layer on the substrate, and forming a first electrode between the metallization layer and the via layer, where the first electrode is electrically connected to the metallization layer. The method also includes forming a second electrode between the metallization layer and the via layer, where the second electrode is electrically connected to the via layer, and forming a dielectric layer between the first electrode and the second electrode, where the first electrode is not electrically connected to any other conductors other than through the metallization layer, and where the second electrode is not electrically connected to any conductors other than through the via layer.

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Nantou County, Taiwan

Pei-Jen Wang