Nikon Research Corporation of America

Pedro Reynoso-Mora

Michel Pharand

Jonathan Kyle Wells

Patrick S Chang

Matthew D Rosa

An actuator assembly () for moving a device () includes a stator component (), a mover component (), a measurement system (), and a signal processor (). The measurement system () includes (i) a magnet assembly () that is coupled to and moves with the mover component (); and (ii) a plurality of spaced apart sensors (A). The magnet assembly () produces a magnetic field (B) that moves relative to the stator component () as the mover component () moves along a mover axis (C). Each sensor (A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (B) from the magnet assembly () as the mover component () is moved relative to the sensors (A). The signal processor () receives the sensor signals and estimates a position of the mover component () along the mover axis (C) based at least in part on the sensor signals.

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Mexico City, Mexico

Pedro Reynoso-Mora