Applied Materials, Inc.

Pedram Sabouri

Dennis R Smith

Peter Reimer

Paul Kevin Reimer

Douglas Royce

An apparatusfor processing a substratecomprises an integrated pumping systemhaving a high operating efficiency, small size, and low vibrational and noise levels. The apparatuscomprises a chamber, such as a load-lock chambertransfer chamberor process chamberAn integrated and local pumpis abutting or adjacent to one of the chambersfor evacuating gas from the chambers. The pump has an inletconnected to a chamberand an outletthat exhausts the gas to atmospheric pressure. Preferably, the pumpcomprises a pre-vacuum pump or a low vacuum pump.

Processing apparatus having integrated pumping system

An apparatusfor processing a substrate, comprises an integrated pumping systemhaving a high operating efficiency, small size, and low vibrational and noise levels. The apparatuscomprises a chamber, such as a load-lock chamber, transfer chamber, or process chamber. An integrated pumpis abutting or adjacent to one of the chambersfor evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inletconnected to a chamber, and an outletthat exhausts the gas to atmospheric pressure. Preferably, the integrated pumpcomprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.

An apparatus for processing a substrate , comprises an integrated pumping system having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus comprises a chamber, such as a load-lock chamber , transfer chamber , or process chamber . An integrated pump is abutting or adjacent to one of the chambers for evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inlet connected to a chamber , and an outlet that exhausts the gas to atmospheric pressure. Preferably, the integrated pump comprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.

Generally, a vacuum pumping system having efficient power usage is provided. In one embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of internal volume that is about 20 to about 130. In another embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of power consumption that is about 5 to about 20. In yet another embodiment, the first pump and second pump have a ratio of pumping capacity that is about 50 to about 200.

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Santa Clara, CA, United States of America

Pedram Sabouri