Carl Zeiss Smt Gmbh

Messer Industries Usa, Inc.

Linde Gmbh

Kunststoff-institut Lüdenscheid (kimw Gmbh)

Pawel Szych

Klaus Edinger

Michael Budach

Thorsten Hofmann

Gabriel Baralia

Rolf Heninger

Andreas Praller

Andreas Kürten

A method for impregnating a polymeric granulate with a physical blowing agent is disclosed. The polymeric granulate can be a typical material such as a polycarbonate that is used in foam injection moulding processes. The physical blowing agent can be carbon dioxide which impregnates that polymeric granulate at a temperature range of 40&#xb0; to 120&#xb0; C. and a pressure range of 15 to 55 bar. Preferably, the polymeric granulate is heated in a range of 50&#xb0; to 90&#xb0; with a range of 60&#xb0; to 80&#xb0; preferred. A pressure range of 25 to 45 bar is preferred with a range of 30 to 40 bar more preferred.

Method for impregnation a polymeric granulate with a physical blowing agent

The present invention relates to apparatuses and methods for examining a surface of a test object, such as e.g. a lithography mask. In accordance with one aspect of the invention, an apparatus for examining a surface of a mask comprises a probe which interacts with the surface of the mask, and a measuring apparatus for establishing a reference distance of the mask from a reference point, wherein the measuring apparatus measures the reference distance of the mask in a measurement region of the mask which is not arranged on the surface of the mask.

Apparatus and method for examining a surface of a mask

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Munich, Germany

Pawel Szych