Robert Boschgmbh

Robert Bosch Bmgh

Taylor Hobson Limited

Pawel Drabarek

Dominique Marchal

Matthias Fleischer

Marc-Henri Duvoisin

Goetz Kuehnle

Stefan Franz

Dominique Breider

David Rychtarik

Siegbert Steinlechner

Michael Lindner

Vincent Thominet

Jochen Straehle

Peter Riegger

Thomas Pfendler

Friedrich Prinzhausen

Thilo May

Jan Fischer

Christian Am Weg

Gerald Franz

Ulrich Lessing

Heins-Erdam Bollhagen

Norbert Streibl

Ralf Kochendoerfer

Gerhard Ortner

Peter Eiswirt

Rolf Ofen

Johannes Schwider

Michael Van Keulen

An optical measuring probe for measuring inner and/or outer diameters of objects, uses a first optical element for focusing or collimating an optical beam onto a surface of an object. A second optical element for splitting the optical beam into a first measuring beam and a second measuring beam is provided in the optical measuring probe in such a way that the second measuring beam is guided out of the measuring probe in a direction opposite the direction of the first measuring beam and that the first measuring beam forms a first scan point and the second measuring beam forms a second scan point. Also described is a corresponding method for measuring diameters using the optical measuring probe. The optical measuring probe and the associated method make it possible to optically measure inner and outer diameters of measuring probes objects in a simple manner.

Optical measuring probe and method for optically measuring inner diameters

A device for the tactile determination of a surface shape of a measuring object includes a micro probe arm having a stylus tip, the micro probe arm being fastened on an optical fiber having a fiber end, which is mounted in a probe housing, a reference mirror is provided in the probe housing, and an optical measuring device is provided for determining the position of the fiber end in relation to the reference mirror. The contactless interferometric determination of the distance between the fiber end of the optical fiber and the reference mirror attached in the probe housing allows precise determination of the surface shape of the measuring object.

Tactile microprobe arm fastened to freestanding end of an optical fiber

An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.

Optical system for illuminating a measured object and interferometric system for measuring surfaces of a measured object

An interferometric path and/or rotation measuring device has a transducer unit with grating element, which transducer cooperates with a light conductor unit and a light pickup unit to detect a linear and/or rotational movement of the grating element in such a way that two partial beams of the light conductor unit which are aimed at the grating element, generate a superposition signal which is detectable by the light pickup unit and is a function of the linear or rotational movement and/or a position of the grating element. A modulation interferometer unit is connected upstream from the light conductor unit and has an arrangement for beam splitting into the two partial beams.

Interferometric path and/or rotation measuring device

An optical fiber probe for an interferometric measuring device having a mechanical receptacle into which an optical fiber is inserted, having a fiber end piece which projects over the mechanical receptacle and contains optical components for guiding a measuring beam onto a measuring object, and having a reflection zone situated in the fiber for partial reflection of a light beam guided in the fiber. The reflection zone is situated in the fiber end piece. A method for manufacturing such an optical fiber probe. The fiber is separated at a predefined point, a partially reflecting coating is applied to at least one of the separation sites, and the two fiber parts are subsequently reconnected. The optical fiber probes may thus be manufactured with a long fiber end piece, which makes it possible to interferometrically measure deep cavities having a small diameter.

Optical fiber probe for an interferometric measuring device and method for manufacturing an optical fiber probe

A device for coupling beam guides of optical systems for unidirectional or bidirectional transmission of beams via a beam transition between the optical systems is provided, the device having a connecting device and mechanical centering means. The connecting device provides a magnetic coupling for implementing a coupling connection in a coupling area. The centering means are situated opposite one another on the optical systems and coupled in such a way to cause the beam guides to self-center due to the attraction caused by the magnetic forces.

Coupling device for a light guide

An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.

Interferometric measuring device

An interferometric measuring device for recording the shape, the roughness or the clearance distance of the surface of a measured object is provided, the measuring device having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and which has a first beam splitter for splitting the radiation supplied into a first beam component guided via a first arm, and into a second beam component guided via a second arm. One beam is shifted with respect to the other beam, with the aid of a modulating device, in terms of the beam's light phase or light frequency, and passes through a delay line. The two beams are subsequently combined at an additional beam splitter of the modulating interferometer. A measuring probe that is spatially separated from the modulating interferometer is coupled to it or able to be coupled to it via a light-conducting fiber set-up, in which probe the combined beam components are split into a measuring beam guided to the surface by a probe-optical fiber unit having a slantwise exit surface on the object side and a reference beam. An accurate surface measurement is facilitated by the angle of inclination of the exit surface to the normal of the optical probe axis amounting to at least 46&#xb0;.

An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short coherent radiation by a radiation source, having a measuring probe that is spatially separated from the modulating interferometer and is coupled to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and having receiver and evaluating devices for converting the supplied radiation into electrical signals and for evaluating the signals based on phase difference. A construction for reliable measurements even in tight hollow spaces provides that the partially transmitting region is formed by a slanting exit face of a probe fiber at an exit angle as to the optical probe axis and a likewise slanting entrance face, of a fiber section following on the object side, as to the optical probe axis at an entrance angle, a wedge-shaped gap being formed between the exit and entrance surfaces.

Interferometric measuring device utilizing a slanted probe filter

An interferometric measuring device for measuring surface characteristics, shapes, distances, and changes in distance, for example vibrations, of measurement objects includes a probe section. A configuration with respect to ease of use and error-free scanning may be provided by the fact that the probe section is subdivided into a fixed probe section and a rotatable probe section mechanically and optically coupled thereto, and that a beam splitter is arranged in the rotatable probe section for creating a reference beam and a measuring beam for the interferometric measurement.

An interferometric measuring method and device for measuring the shape of, or the distance to, surfaces are provided, in which light is generated, modulated with respect to its frequency, conducted to both an object surface and a reference surface, brought to interference, and conducted to a photodetector, and, to detect the particular distance, a phase of the photodetector signal is evaluated. A simple, rugged configuration, with the capability of taking a high-resolution measurements in the context of a large unambiguity range, is achieved in that the phase is considered in at least two different instants with the wavelengths that correspond on the basis of the frequency modulation, and the results are fed to the evaluation.

Interferometric measuring method and device for measuring the shape of or the distance to surfaces

The present invention relates to a interferometric measuring device for measuring the shape especially of rough surfaces of a measured object (O), having a radiation-producing unit (SLD) emitting short-coherent radiation, a beam splitter (ST ) for forming a first and a second beam component (T , T ), of which the first is directed via an object light path to the measured object (O), and the second is directed via a reference light path to a reflecting reference plane (RSP), having a superposition element at which the radiation coming from the measured object (O) and the reference plane (RSP) are brought to superposition, and an image converter (BS), which receives the superposed radiation and sends corresponding signals to a device for evaluation, for the measurement to be taken, the optical path length of the object light path being changed relative to the optical path length of the reference light path. An exact measuring of object surfaces in narrow cavities, in three dimensions, having great accuracy, is made possible by providing in the optical light path an optical probe (OS, OSO) having an optical arrangement for producing at least one optical intermediate image.

Interferometric measuring device for form measurement

An interferometric measuring device for measuring surface characteristics, shapes, distances, and distance variations, e.g., vibrations, in particular in narrow, hollow spaces, of measuring objects, having a probe part and an optical fiber. Surface dimensions are able to be measured, even in very fine bore holes, in that, in a measuring head, at the free end of the probe part approaching the measuring object, the optical fiber projects out and is itself designed as a measuring fiber for illuminating a point of measurement and for picking up measuring light coming from this measuring point.

Short coherence fiber probe interferometric measuring device

An interferometric measuring device for detecting the shape of rough surfaces includes a spatially coherent beam gun unit that emits a short time coherent and broad-band beam. The device is separated into a section containing the components of a modulation interferometer and the components of a measuring probe. The measuring probe is coupled to the modulation interferometer via an optical fiber arrangement, and used remotely from the modulation interferometer.

Interferometric measuring device for determining the profile or the pitch of especially rough surfaces

An interferometric measuring device for detecting the shape, roughness or distance of surfaces is described. The interferometric measuring device has a modulation interferometer in which two partial beams are formed, one of which is shifted in its light phase or light frequency with respect to the other by a modulation device. The surface is measured with a measuring probe which is connected to the modulation interferometer and in which a measuring beam and a reference beam are formed, and an interference pattern which is analyzed in a connected receiving unit is formed from the measuring beam and the reference beam. A compact design that is easy to handle even in a manufacturing process is achieved by spatially separating the modulation interferometer which is designed as a basic unit from the measuring probe and by the fact that it can be connected to the measuring probe by an optical fiber arrangement, and the measuring arm and the reference arm are formed by solids conducting the measuring beam and the reference beam.

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Tiefenbronn, Germany

Pawel Drabarek