Asml Netherlands B.v.

Pavel Seroglazov

Andrey Alexandrovich Nikipelov

Reinier Theodorus Martinus Jilisen

Kornelis Frits Feenstra

Nicolaas Antonius Allegondus Johannes Van Asten

Niek Antonius Jacobus Maria Kleemans

Arjen Teake De Jong

Harald Ernest Verbraak

Rolf Theodorus Nicolaas Beijsens

A radiation system to generate a radiation emitting plasma, the radiation system include a fuel emitter to provide a fuel target at a plasma formation region, a first laser arranged to provide a first laser beam at the plasma formation region incident on the fuel target to generate a radiation emitting plasma, an imaging device arranged to obtain a first image of the radiation emitting plasma at the plasma formation region, the first image indicating at least one image property of the radiation emitting plasma, and a controller. The controller is arranged to receive the first image, and to generate at least one instruction based on the at least one image property of the radiation emitting plasma to modify operation of at least one component of the radiation system to reduce a detrimental effect of debris.

Radiation source having debris control

Growing community of inventors

Eindhoven, Netherlands

Pavel Seroglazov