Applied Materials, Inc.

Pavankumar Ramanand Harapanhalli

Yao-Hung Yang

Fred Eric Ruhland

Gaurav Shrivastava

Embodiments of substrate supports are provided herein. In some embodiments, a substrate support includes: a first plate having a plurality of openings extending into the first plate from an upper surface of the first plate to a bottom surface of each respective opening of the plurality of openings; a plurality of tabs comprising three or more tabs disposed in each respective opening and extending towards the upper surface of the first plate; and a plurality of support elements disposed in each of the plurality of openings, wherein the plurality of tabs are disposed around each of the plurality of support elements and configured to retain the plurality of support elements in the plurality of openings.

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Bengaluru, India

Pavankumar Ramanand Harapanhalli