Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Aviza Technology Limited (1 from 29 patents)
2. Spp Process Technology Systems UK Limited (1 patent)
1 patent:
1. 8425741 - Ion deposition apparatus having rotatable carousel for supporting a plurality of targets